Calibration and use of a MEMS surface fence for wall shear stress measurements in turbulent flows
Savelsberg, Ralph, Schiffer, Michael, Obermeier, Ernst, Castro, Ian P.
Published in Experiments in fluids (01.08.2012)
Published in Experiments in fluids (01.08.2012)
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Journal Article
AeroMEMS polyimide based wall double hot-wire sensors for flow separation detection
Buder, Ulrich, Petz, Ralf, Kittel, Moritz, Nitsche, Wolfgang, Obermeier, Ernst
Published in Sensors and actuators. A. Physical. (10.03.2008)
Published in Sensors and actuators. A. Physical. (10.03.2008)
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Journal Article
Measurement of Young’s modulus and residual stress of thin SiC layers for MEMS high temperature applications
Pabst, Oliver, Schiffer, Michael, Obermeier, Ernst, Tekin, Tolga, Lang, Klaus Dieter, Ngo, Ha-Duong
Published in Microsystem technologies (01.08.2012)
Published in Microsystem technologies (01.08.2012)
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Journal Article
Conference Proceeding
System Integration Challenges for a Slider With an Integrated Microactuator
Hoheisel, Dominik, Cvetkovic, Srecko, Kurniawan, Willyanto, Obermeier, Ernst, Gatzen, Hans H.
Published in IEEE transactions on magnetics (01.06.2010)
Published in IEEE transactions on magnetics (01.06.2010)
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Journal Article
Conference Proceeding
A Slider With an Integrated Microactuator (SLIM) for Second Stage Actuation in Hard Disc Drives
Gatzen, H.H., Freitas, P., Obermeier, E., Robertson, J.
Published in IEEE transactions on magnetics (01.11.2008)
Published in IEEE transactions on magnetics (01.11.2008)
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Journal Article
Conference Proceeding
Second-Stage Actuation for Hard Disc Drives Through MEMS Technology
Gatzen, Hans H., Freitas, Paulo J. P., Obermeier, Ernst, Robertson, John
Published in IEEE transactions on magnetics (01.03.2010)
Published in IEEE transactions on magnetics (01.03.2010)
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Journal Article
Conference Proceeding
A new analytical solution for the load-deflection of square membranes
Maier-Schneider, D., Maibach, J., Obermeier, E.
Published in Journal of microelectromechanical systems (01.12.1995)
Published in Journal of microelectromechanical systems (01.12.1995)
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Journal Article
AeroMEMS Wall Hot-Wire Anemometer on Polyimide Substrate Featuring Top Side or Bottom Side Bondpads
Buder, U., Berns, A., Petz, R., Nitsche, W., Obermeier, E.
Published in IEEE sensors journal (01.08.2007)
Published in IEEE sensors journal (01.08.2007)
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Journal Article
Operating Range Optimization of a Slider With an Integrated Microactuator (SLIM) for Hard Disk Drives
Dinulovic, D., Pape, F., Saalfeld, H., Kurniawan, W., Obermeier, E., Gatzen, H.H.
Published in IEEE transactions on magnetics (01.10.2009)
Published in IEEE transactions on magnetics (01.10.2009)
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Journal Article
Conference Proceeding
Liquid-free, piezoresistive, SOI-based pressure sensor for high temperature measurements up to 400 °C
Ha-Duong Ngo, Mukhopadhyay, B., Thanh, V. C., Mackowiak, P., Schlichting, V., Obermeier, E., Lang, K-D, Giuliani, A., Drera, L., Arancio, D.
Published in 2012 IEEE Sensors (01.10.2012)
Published in 2012 IEEE Sensors (01.10.2012)
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Conference Proceeding
Electrochemical etching of n-type 6H-SiC without UV illumination
Wei-Hsu Chang, Schellin, B., Obermeier, E., Yu-Chung Huang
Published in Journal of microelectromechanical systems (01.06.2006)
Published in Journal of microelectromechanical systems (01.06.2006)
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Journal Article
Micro gas-flow sensor with integrated heat sink and flow guide
Qiu, Li, Hein, Stefan, Obermeier, Ernst, Schubert, Axel
Published in Sensors and actuators. A. Physical. (01.06.1996)
Published in Sensors and actuators. A. Physical. (01.06.1996)
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Journal Article
Low Power Piezoelectric Micro Mass Flow Controller for Liquid Fuel Injection
Schiffer, M., Obermeier, E., Stefanini, C., Manente, V., Tunestal, P.
Published in 2007 IEEE Sensors (01.10.2007)
Published in 2007 IEEE Sensors (01.10.2007)
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Conference Proceeding
COMPONENT ARRANGEMENT AND METHOD FOR MANUFACTURING A COMPONENT ARRANGEMENT
ENGELHARDT PETER, OBERMEIER, ERNST, SAFRONOV, GRIGORIY, RACZKOWSKI, SABINE, ROHLEDER SEBASTIAN, A.GREEN, BECK STEFAN
Year of Publication 22.07.2022
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Year of Publication 22.07.2022
Patent
Design and simulation of ultra high sensitive piezoresistive MEMS sensor with structured membrane for low pressure applications
Mackowiak, P, Schiffer, M, Xin Xu, Obermeier, E, Ha-Duong Ngo
Published in 2010 12th Electronics Packaging Technology Conference (01.12.2010)
Published in 2010 12th Electronics Packaging Technology Conference (01.12.2010)
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Conference Proceeding