Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness
Huizinga, Theodorus Mattheus Joannus Maria, Wijckmans, Maurice Willem Jozef Etienne, Butler, Hans, Fischer, Olof Martinus Josephus, Hoogendam, Christiaan Alexander, Rovers, Johannes Marinus Maria, Vennat, Eric Pierre-Yves, Kimman, Maarten Hartger
Year of Publication 08.06.2021
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Year of Publication 08.06.2021
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BEARING DEVICE, MAGNETIC GRAVITY COMPENSATOR, VIBRATION ISOLATION SYSTEM, LITHOGRAPHIC APPARATUS, METHOD TO CONTROL A GRAVITY COMPENSATOR HAVING A NEGATIVE STIFFNESS, AND SPRING
FISCHER, Olof Martinus Josephus, ROVERS, Johannes Marinus Maria, WIJCKMANS, Maurice Willem Jozef Etiënne, KIMMAN, Maarten Hartger, HOOGENDAM, Christiaan Alexander, BUTLER, Hans, HUIZINGA, Theodorus Mattheus Joannus Maria, VENNAT, Eric Pierre-Yves
Year of Publication 13.02.2020
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Year of Publication 13.02.2020
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BEARING DEVICE, MAGNETIC GRAVITY COMPENSATOR, VIBRATION ISOLATION SYSTEM, LITHOGRAPHIC APPARATUS, METHOD TO CONTROL A GRAVITY COMPENSATOR HAVING A NEGATIVE STIFFNESS, AND SPRING
FISCHER, Olof Martinus Josephus, ROVERS, Johannes Marinus Maria, WIJCKMANS, Maurice Willem Jozef Etiënne, KIMMAN, Maarten Hartger, HOOGENDAM, Christiaan Alexander, BUTLER, Hans, HUIZINGA, Theodorus Mattheus Joannus Maria, VENNAT, Eric Pierre-Yves
Year of Publication 22.01.2020
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Year of Publication 22.01.2020
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Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, method to control a gravity compensator having a negative stiffness, and spring
ERIC PIERRE-YVES VENNAT, CHRISTIAAN ALEXANDER HOOGENDAM, OLOF MARTINUS JOSEPHUS FISCHER, JOHANNES MARINUS MARIA ROVERS, MAURICE WILLEM JOZEF ETIËNNE WIJCKMANS, MAARTEN HARTGER KIMMAN, THEODORUS MATTHEUS JOANNUS MARIA HUIZINGA, HANS BUTLER
Year of Publication 19.09.2018
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Year of Publication 19.09.2018
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Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, method to control a gravity compensator having a negative stiffness, and spring
ROVERS, JOHANNES MARINUS MARIA, WIJCKMANS, MAURICE WILLEM JOZEF ETIENNE, HUIZINGA, THEODORUS MATTHEUS JOANNUS MARIA, VENNAT, ERIC PIERRE-YVES, FISCHER, OLOF MARTINUS JOSEPHUS, BUTLER, HANS, HOOGENDAM, CHRISTIAAN ALEXANDER, KIMMAN, MAARTEN HARTGER
Year of Publication 01.07.2019
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Year of Publication 01.07.2019
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Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, method to control a gravity compensator having a negative stiffness, and spring
ROVERS, JOHANNES MARINUS MARIA, WIJCKMANS, MAURICE WILLEM JOZEF ETIENNE, HUIZINGA, THEODORUS MATTHEUS JOANNUS MARIA, VENNAT, ERIC PIERRE-YVES, FISCHER, OLOF MARTINUS JOSEPHUS, BUTLER, HANS, HOOGENDAM, CHRISTIAAN ALEXANDER, KIMMAN, MAARTEN HARTGER
Year of Publication 01.11.2018
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Year of Publication 01.11.2018
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