Contrasting single-wafer and batch processing for memory devices : Single-wafer manufacturing in the nanochip era
WEIMER, Ronald A, EPPICH, Denise Marra, BEAMAN, Kevin L, POWELL, D. Carl, GONZALEZ, Fernando
Published in IEEE transactions on semiconductor manufacturing (2003)
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Published in IEEE transactions on semiconductor manufacturing (2003)
Journal Article
Contrasting single-wafer and batch processing for memory devices
Weimer, R.A., Eppich, D.M., Beaman, K.L., Powell, D.C., Gonzalez, F.
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Published in IEEE transactions on semiconductor manufacturing (01.05.2003)
Get full text
Journal Article