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Published in Measurement science & technology (01.01.2007)
Published in Measurement science & technology (01.01.2007)
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Mechanism of single-shot damage of Ru thin films irradiated by femtosecond extreme UV free-electron laser
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Published in Optics express (23.07.2018)
Published in Optics express (23.07.2018)
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Characterization of megahertz X-ray laser beams by multishot desorption imprints in PMMA
Vozda, Vojtěch, Burian, Tomáš, Hájková, Věra, Juha, Libor, Enkisch, Hartmut, Faatz, Bart, Hermann, Martin, Jacyna, Iwanna, Jurek, Marek, Keitel, Barbara, Klinger, Dorota, Loch, Rolf, Louis, Eric, Makhotkin, Igor A., Plönjes, Elke, Saksl, Karel, Siewert, Frank, Sobierajski, Ryszard, Strobel, Sebastian, Tiedtke, Kai, Toleikis, Sven, de Vries, Gosse, Zelinger, Zdeněk, Chalupský, Jaromír
Published in Optics express (31.08.2020)
Published in Optics express (31.08.2020)
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Role of heat accumulation in the multi-shot damage of silicon irradiated with femtosecond XUV pulses at a 1 MHz repetition rate
Sobierajski, Ryszard, Jacyna, Iwanna, Dłużewski, Piotr, Klepka, Marcin T, Klinger, Dorota, Pełka, Jerzy B, Burian, Tomáš, Hájková, Věra, Juha, Libor, Saksl, Karel, Vozda, Vojtěch, Makhotkin, Igor, Louis, Eric, Faatz, Bart, Tiedtke, Kai, Toleikis, Sven, Enkisch, Hartmut, Hermann, Martin, Strobel, Sebastian, Loch, Rolf A, Chalupsky, Jaromir
Published in Optics express (11.07.2016)
Published in Optics express (11.07.2016)
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Experimental study of EUV mirror radiation damage resistance under long‐term free‐electron laser exposures below the single‐shot damage threshold
Makhotkin, Igor A., Sobierajski, Ryszard, Chalupský, Jaromir, Tiedtke, Kai, de Vries, Gosse, Störmer, Michael, Scholze, Frank, Siewert, Frank, van de Kruijs, Robbert W. E., Milov, Igor, Louis, Eric, Jacyna, Iwanna, Jurek, Marek, Klinger, Dorota, Nittler, Laurent, Syryanyy, Yevgen, Juha, Libor, Hájková, Věra, Vozda, Vojtěch, Burian, Tomáš, Saksl, Karel, Faatz, Bart, Keitel, Barbara, Plönjes, Elke, Schreiber, Siegfried, Toleikis, Sven, Loch, Rolf, Hermann, Martin, Strobel, Sebastian, Nienhuys, Han-Kwang, Gwalt, Grzegorz, Mey, Tobias, Enkisch, Hartmut
Published in Journal of synchrotron radiation (01.01.2018)
Published in Journal of synchrotron radiation (01.01.2018)
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Journal Article
PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC EXPOSURE APPARATUS
MUELLENDER STEPHAN, MANN HANS JUERGEN, ENKISCH HARTMUT, FREIMANN ROLF
Year of Publication 16.09.2013
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Year of Publication 16.09.2013
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