Determination of local electrostatic forces for EUVL mask chucks
Kalkowski, Gerhard, Peschel, Thomas, Risse, Stefan, Müller, Sandra, Engelstad, Roxann L., Zeuske, Jacob R., Vukkadala, Pradeep
Published in Microelectronic engineering (01.05.2010)
Published in Microelectronic engineering (01.05.2010)
Get full text
Journal Article
Conference Proceeding
Mechanical response of X-ray masks
LAUDON, M. F, LAIRD, D. L, ENGELSTAD, R. L, CERRINA, F
Published in Japanese Journal of Applied Physics (01.12.1993)
Published in Japanese Journal of Applied Physics (01.12.1993)
Get full text
Conference Proceeding
Journal Article
Mechanical modeling of Projection Electron-beam Lithography masks
DICKS, G. A, ENGELSTAD, R. L, LOVELL, E. G, LIDDLE, J. A
Published in Japanese Journal of Applied Physics (01.12.1997)
Published in Japanese Journal of Applied Physics (01.12.1997)
Get full text
Conference Proceeding
Journal Article