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"ENDO, RICK, R"
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"ENDO, RICK, R"
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Method and apparatus for wafer cleaning
by
Verhaverbeke, Steven
,
Truman, J. Kelly
,
Ko, Alexander
,
Endo
,
Rick R
Year of Publication
23.11.2010
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Method and apparatus for wafer cleaning
by
Verhaverbeke, Steven
,
Truman, J. Kelly
,
Ko, Alexander
,
Endo
,
Rick R
Year of Publication
26.10.2010
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Method and apparatus for wafer cleaning
by
Verhaverbeke, Steven
,
Truman, J. Kelly
,
Ko, Alexander
,
Endo
,
Rick R
Year of Publication
18.11.2008
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Method and apparatus for wafer cleaning
by
Verhaverbeke, Steven
,
Truman, J. Kelly
,
Ko, Alexander
,
Endo
,
Rick R
Year of Publication
26.02.2008
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Method and apparatus for wafer cleaning
by
KO ALEXANDER
,
ENDO RICK R
,
VERHAVERBEKE STEVEN
,
TRUMAN J. KELLY
Year of Publication
23.11.2010
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Method and apparatus for wafer cleaning
by
KO ALEXANDER
,
ENDO RICK R
,
VERHAVERBEKE STEVEN
,
TRUMAN J. KELLY
Year of Publication
26.10.2010
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Patent
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Semiconductor substrate processing apparatus with a passive substrate gripper
by
Wadensweiler, Ralph M
,
Endo
,
Rick R
,
Ko, Alexander S
Year of Publication
06.11.2007
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Method and apparatus for chemical mixing in a single wafer process
by
Verhaverbeke, Steven
,
Truman, J. Kelly
,
Endo
,
Rick R
,
Ko, Alexander
Year of Publication
17.04.2007
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Method and apparatus for chemical mixing in a single wafer process
by
ENDO RICK R
,
KO ALEXANDER
,
VERHAVERBEKE STEVEN
,
TRUMAN J. KELLY
Year of Publication
29.01.2009
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METHOD AND APPARATUS FOR CLEANING A SUBSTRATE
by
KO ALEXANDER
,
ENDO RICK R
,
VERHAVERBEKE STEVEN
,
TRUMAN J. KELLY
Year of Publication
22.01.2009
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Method and apparatus for wafer cleaning
by
KO ALEXANDER
,
ENDO RICK R
,
VERHAVERBEKE STEVEN
,
TRUMAN J. KELLY
Year of Publication
25.12.2008
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Method and apparatus for wafer cleaning
by
KO ALEXANDER
,
ENDO RICK R
,
VERHAVERBEKE STEVEN
,
TRUMAN J. KELLY
Year of Publication
18.11.2008
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Patent
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Method and apparatus for wafer cleaning
by
TRUMAN J. K
,
KO ALEXANDER
,
ENDO RICK R
,
VERHAVERBEKE STEVEN
Year of Publication
10.04.2008
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Method and apparatus for wafer cleaning
by
TRUMAN J. K
,
KO ALEXANDER
,
ENDO RICK R
,
VERHAVERBEKE STEVEN
Year of Publication
10.04.2008
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Method and apparatus for wafer cleaning
by
TRUMAN J. K
,
KO ALEXANDER
,
ENDO RICK R
,
VERHAVERBEKE STEVEN
Year of Publication
28.02.2008
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Method and apparatus for wafer cleaning
by
KO ALEXANDER
,
ENDO RICK R
,
VERHAVERBEKE STEVEN
,
TRUMAN J. KELLY
Year of Publication
26.02.2008
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Semiconductor substrate processing apparatus with a passive substrate gripper
by
ENDO RICK R
,
WADENSWEILER RALPH M
,
KO ALEXANDER S
Year of Publication
06.11.2007
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A SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS WITH A PASSIVE SUBSTRATE GRIPPER
by
WADENSWEILER, RALPH, M
,
KO, ALEXANDER, S
,
ENDO
,
RICK
,
R
Year of Publication
01.11.2007
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Method and apparatus for chemical mixing in a single wafer process
by
ENDO RICK R
,
KO ALEXANDER
,
VERHAVERBEKE STEVEN
,
TRUMAN J. KELLY
Year of Publication
17.04.2007
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Patent
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A SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS WITH A PASSIVE SUBSTRATE GRIPPER
by
WADENSWEILER, RALPH, M
,
KO, ALEXANDER, S
,
ENDO
,
RICK
,
R
Year of Publication
04.01.2007
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