Dynamics of Output Spectra within a Single Laser Pulse from a Line-Narrowed Excimer Laser
Enami, Tatsuo, Hori, Tsukasa, Ohta, Takeshi, Mizoguchi, Hakaru, Okada, Tatsuo
Published in Japanese Journal of Applied Physics (01.01.2000)
Published in Japanese Journal of Applied Physics (01.01.2000)
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Journal Article
Performance Improvement of a Discharge-Pumped ArF Excimer Laser by Xenon Gas Addition
Kataoka, Naoki, Itagaki, Motoya, Uchino, Kiichiro, Muraoka, Katsunori, Takahashi, Akihiko, Okada, Tatsuo, Maeda, Mitsuo, Hori, Tsukasa, Terashima, Katsutomo, Sumitani, Akira, Enami, Tatsuo, Mizoguchi, Hakaru
Published in Japanese Journal of Applied Physics (01.12.1999)
Published in Japanese Journal of Applied Physics (01.12.1999)
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Journal Article
Highly Energy-Stabilized and Narrow Band Excimer Laser for Steppers
MIZOGUCHI, Hakaru, ENAMI, Tatsuo, NISHISAKA, Toshihiro, TANAKA, Hirokazu, WAKABAYASHI, Osamu
Published in Rēzā kenkyū (1999)
Published in Rēzā kenkyū (1999)
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Journal Article
Management of Product Development on Architecture Evolution Analyzing the Semiconductor Exposure Tool Industry
Enami, Tatsuo, Taji, Noriko
Published in 2016 International Conference on Engineering, Technology and Innovation/IEEE lnternational Technology Management Conference (ICE/ITMC) (01.06.2016)
Published in 2016 International Conference on Engineering, Technology and Innovation/IEEE lnternational Technology Management Conference (ICE/ITMC) (01.06.2016)
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Conference Proceeding
レーザー装置
Ohigashi, N., Kiyochi, M., Tsunawaki, Y., Fujita, M., Imasaki, K., Nakai, S., Mima, K., Kuruma, Shin-ichiro, Goto, Michio, Kokubo, Masayuki, Nakao, Naoya, Yamanama, Chiyoe, Kase, T., Aoyama, M., Akahane, Y., Nakano, F., Matsuoka, S., Yamakawa, K., Ohmae, Goichi, Yagi, Takashi, Ito, Shinji, Moon, Ahsa, Izumida, S., Ono, S., Liu, Z., Ohtake, H., Sarukura, N., Geng, Jihong, Wada, Satoshi, Urata, Yoshiharu, Tashiro, Hideo, Minamihata, R., Kodama, H., Tanoue, J., Kawanaka, J., Kubodera, S., Sasaki, W., Kurosawa, K., Terashima, Katsutomo, Tanaka, Hirokazu, Kubo, Hlrokazu, Suzuki, Toru, Ohta, Takeshi, Enami, Tatsuo, Wakabayashi, Osamu, Mizoguchi, Hakaru, Ohbu, Ayako, Watanabe, Takayuki, Nakano, Masaki, Hori, Tsukasa, Nishisaka, Toshihiro, Itou, Takashi, KOJIMA, Tetsuo, KONNO, Susumu, FUJIKAWA, Shuichi, YASUI, Koji, YOSHIZAWA, Kenji, MORI, Yusuke, SASAKI, Takatomo, TANAKA, Mitsuhiro, OKADA, Yukikatsu, Shimamura, Kiyoshi, Namujilatu, Fukuda, Tsuguo, Matsubara, K., Tanaka, U., Imajo, H., Hayasaka, K., Ohmukai, R., Urabe, S., Watanabe, M., Oba, Masaki, Kato, Masaaki, Maruyama, Yoichiro, Koyata, Y., Yamamoto, S., Hirano, Y., Pavel, Nicolaie, Sato, Akihisa, Ito, Atsushi, Ohshima, Hiroaki, Yoshida, Hiroki, Sakagami, Yukio, Hasama, Toshifumi, Nishioka, H., Onizawa, A., Uehara, N., Ueda, K., Nishimura, Akihiko, Takuma, Hiroshi, Tsunekane, M., Taguchi, N, Inaba, H, SEKITA, Hitoshi, RUTHERFORD, Todd, TULLOCHI, Bill, KASAMATSU, Tadashi, BYER, Robert, Matsui, H., Eguchi, T.
Published in Rēzā kenkyū (1999)
Published in Rēzā kenkyū (1999)
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Journal Article
Development of a 2 kHz F 2 Laser for 157 nm Lithography
Nagai, Shinji, Takehisa, Kiwamu, Enami, Tatsuo, Nishisaka, Toshihiro, Fujimoto, Junichi, Wakabayashi, Osamu, Mizoguchi, Hakaru, Takahashi, Akihiko
Published in Japanese Journal of Applied Physics (01.12.1999)
Published in Japanese Journal of Applied Physics (01.12.1999)
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Journal Article