Feedback Control By RF Waveform Tailoring for Ion Energy Distribution
PHAM Richard, COUMOU David J, REINHARDT Ross, ELNER Yuiry, GILL Daniel M
Year of Publication 02.03.2017
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Year of Publication 02.03.2017
Patent
FEEDBACK CONTROL BY RF WAVEFORM TAILORING FOR ION ENERGY DISTRIBUTION
COUMOU, David J, REINHARDT, Ross, ELNER, Yuiry, GILL, Daniel M, PHAM, Richard
Year of Publication 02.03.2017
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Year of Publication 02.03.2017
Patent
Feedback Control By Rf Waveform Tailoring For Ion Energy Distribution
REINHARDT ROSS, ELNER YUIRY, PHAM RICHARD, COUMOU DAVID J, GILL DANIEL M
Year of Publication 17.04.2018
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Year of Publication 17.04.2018
Patent
Feedback control by RF waveform tailoring for ion energy distribution
PHAM, RICHARD, ELNER, YUIRY, COUMOU, DAVID J, GILL, DANIEL M, REINHARDT, ROSS
Year of Publication 01.03.2017
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Year of Publication 01.03.2017
Patent