PROCESS FOR HYDROGENATING SILICON TETRACHLORIDE TO TRICHLOROSILANE
PAETZOLD UWE, HIRSCHMANN ANDREAS, ELLINGER NORBERT, HAEKL WALTER, KAHLER MARKUS
Year of Publication 23.04.2014
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Year of Publication 23.04.2014
Patent
PROCESS FOR HYDROGENATING SILICON TETRACHLORIDE TO TRICHLOROSILANE
ELLINGER, NORBERT, PAETZOLD, UWE, HIRSCHMANN, ANDREAS, KAHLER, MARKUS, HAECKL, WALTER
Year of Publication 13.10.2015
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Year of Publication 13.10.2015
Patent