Application of self-aligned CoSi2 interconnection in submicrometer CMOS transistors
BROADBENT, E. K, IRANI, R. F, MORGAN, A. E, MAILLOT, P
Published in IEEE transactions on electron devices (01.11.1989)
Published in IEEE transactions on electron devices (01.11.1989)
Get full text
Journal Article
Method and apparatus for uniform electropolishing of damascene ic structures by selective agitation
Mayer, Steven T, Contolini, Robert J, Broadbent, Eliot K, Drewery, John S
Year of Publication 23.03.2004
Get full text
Year of Publication 23.03.2004
Patent