원자 층 에칭 프로세스에 의해 오염 층을 제거하는 방법
EHM DIRK HEINRICH, ROOZEBOOM FRED, ILLIBERI ANDREA, BECKER MORITZ, CREIJGHTON YVES LODEWIJK MARIA, TE SLIGTE EDWIN
Year of Publication 24.02.2020
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Year of Publication 24.02.2020
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플라즈마 조절을 위한 요소를 포함하는 반도체 리소그래피용 투영 노광 시스템
EHM DIRK HEINRICH, SCHMIDT STEFAN WOLFGANG, AMENT IRENE, VOGEL DIANA, WIESNER STEFAN, BECKER MORITZ
Year of Publication 29.01.2019
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Year of Publication 29.01.2019
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EUV EUV LITHOGRAPHY SYSTEM AND OPERATING METHOD
LOGTENBERG HELLA, OSORIO EDGAR, EHM DIRK HEINRICH, SCHMIDT STEFAN WOLFGANG, ZELLENRATH MARK, TE SLIGTE EDWIN
Year of Publication 21.06.2017
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Year of Publication 21.06.2017
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REFLECTIVE OPTICAL ELEMENT AND OPTICAL SYSTEM FOR EUV LITHOGRAPHY
EHM DIRK HEINRICH, HUBER PETER, MUELLENDER STEPHAN, BLANCKENHAGEN GISELA VON
Year of Publication 16.04.2014
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Year of Publication 16.04.2014
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OPTICAL ELEMENT AND OPTICAL SYSTEM FOR EUV LITHOGRAPHY, AND METHOD FOR TREATING SUCH AN OPTICAL ELEMENT
BEKMAN HERMANUS HENDRICUS PETRUS THEODORUS, EHM DIRK HEINRICH, KUZNETSOV ALEXEY, HUIJBREGTSE JEROEN, STORM ARNOLDUS JAN, AMENT IRENE, GRABER TINA, SMEETS DRIES, TE SLIGTE EDWIN
Year of Publication 23.11.2015
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Year of Publication 23.11.2015
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METHOD FOR REMOVING A CONTAMINATION LAYER FROM AN OPTICAL SURFACE, METHOD FOR GENERATING A CLEANING GAS, AND CORRESPONDING CLEANING AND CLEANING GAS GENERATION ARRANGEMENTS
WOLSCHRIJN BASTIAAN THEODOOR, EHM DIRK HEINRICH, MOORS JOHANNES HUBERTUS JOSEPHINA, STORM ARNOLD, STEIN THOMAS, TE SLIGTE EDWIN
Year of Publication 06.08.2014
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Year of Publication 06.08.2014
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PROTECTION MODULE FOR EUV LITHOGRAPHY APPARATUS, AND EUV LITHOGRAPHY APPARATUS
EHM DIRK HEINRICH, KUGLER JENS, BANNEY BEN, LAUFER TIMO, NIEKEN ULRICH, KELLER FRANZ
Year of Publication 19.05.2011
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Year of Publication 19.05.2011
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CLEANING MODULE AND EUV LITHOGRAPHY DEVICE WITH CLEANING MODULE
EHM DIRK HEINRICH, KRAUS DIETER, WIESNER STEFAN, KOEHLER STEFAN, KALLER JULIAN, SCHMIDT STEFAN, CZAP ALMUT, CHUNG HIN YIU ANTHONY
Year of Publication 02.12.2010
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Year of Publication 02.12.2010
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METHOD FOR REMOVING A CONTAMINATION LAYER FROM AN OPTICAL SURFACE, METHOD FOR GENERATING A CLEANING GAS, AND CORRESPONDING CLEANING AND CLEANING GAS GENERATION ARRANGEMENTS
WOLSCHRIJN BASTIAAN THEODOOR, EHM DIRK HEINRICH, MOORS JOHANNES HUBERTUS JOSEPHINA, STORM ARNOLD, STEIN THOMAS, TE SLIGTE EDWIN
Year of Publication 07.09.2010
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Year of Publication 07.09.2010
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