METHOD FOR OPTIMIZING A PROTECTIVE LAYER SYSTEM FOR AN OPTICAL ELEMENT, OPTICAL ELEMENT AND OPTICAL SYSTEM FOR EUV LITHOGRAPHY
STORM, ARNOLDUS, JAN, GRABER, TINA, TE SLIGTE, EDWIN, BEKMANN, HERMANUS, HENDRICUS, PETRUS, THEODORUS, EHM, DIRK, HEINRICH, HUIJBREGTSE, JEROEN
Year of Publication 29.08.2013
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Year of Publication 29.08.2013
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OPTICAL ELEMENT AND OPTICAL SYSTEM FOR EUV LITHOGRAPHY, AND METHOD FOR TREATING SUCH AN OPTICAL ELEMENT
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Year of Publication 18.09.2014
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Year of Publication 18.09.2014
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Reflektives optisches Element für die EUV-Lithographie
Wiesner, Stefan, Schmidt, Stefan-Wolfgang, Becker, Moritz, Shklover, Vitaliy, Ehm, Dirk Heinrich, Ament, Irene, Vogel, Diana
Year of Publication 01.02.2018
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Year of Publication 01.02.2018
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OPTISCHES ELEMENT
Wiesner, Stefan, Becker, Moritz, Schmidt, Stefan-Wolfgang, Ament, Irene, Ehm, Dirk Heinrich
Year of Publication 30.11.2017
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Year of Publication 30.11.2017
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Method for removing a contamination layer from an optical surface and arrangement therefor as well as a method for generating a cleaning gas and arrangement therefor
WOLSCHRIJN BASTIAAN THEODOOR, EHM DIRK HEINRICH, STORM ARNOLD, JOSEPHINA MOORS JOHANNES HUBERTUS, STEIN THOMAS, SLIGTE EDWIN TE
Year of Publication 16.04.2013
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Year of Publication 16.04.2013
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OPTICAL SYSTEM
SEITZ, WOLFGANG, HACKL, TOBIAS, WEISS, MARKUS, EHM, DIRK HEINRICH, ZACZEK, CHRISTOPH
Year of Publication 22.12.2011
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Year of Publication 22.12.2011
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Projektionsbelichtungsanlage mit Sensoreinheit zur Partikeldetektion
Schmidt, Stefan-Wolfgang, Storm, Arnoldus Jan, Ehm, Dirk Heinrich, Williams-Peters, Alisia, Logtenberg, Hella
Year of Publication 19.10.2017
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Year of Publication 19.10.2017
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PROJECTION EXPOSURE SYSTEM HAVING A SENSOR UNIT FOR DETECTING PARTICLES
EHM, Dirk, Heinrich, WILLEMS-PETERS, Alisia, SCHMIDT, Stefan-Wolfgang, STORM, Arnoldus, Jan, LOGTENBERG, Hella
Year of Publication 19.10.2017
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Year of Publication 19.10.2017
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Verfahren zum Aufbringen einer Deckschicht und reflektives optisches Element
Sligte, Edwin te, llliberi, Andrea, Roozeboom, Fred, Becker, Moritz, Ehm, Dirk Heinrich
Year of Publication 14.09.2017
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Year of Publication 14.09.2017
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METHOD OF REMOVING CONTAMINATION LAYER FROM OPTICAL SURFACE, METHOD OF PRODUCING CLEANING GAS, AND CORRESPONDING STRUCTURE OF CLEANING AND PRODUCING CLEANING GAS
BASTIAAN THEODOOR WOLSCHRIJN, DIRK HEINRICH EHM, MOORES JOHANNES HUBERTUS JOSEPHINA, THOMAS STEIN, ARNOLDUS STORM, EDWIN TE SLIGTE
Year of Publication 27.12.2012
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Year of Publication 27.12.2012
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