Search Results - "EHM DIRK HEINRICH" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

PROTECTION MODULE AND EUV LITHOGRAPHY APPARATUS WITH PROTECTION MODULE

PROTECTION MODULE AND EUV LITHOGRAPHY APPARATUS WITH PROTECTION MODULE

by EHM, DIRK HEINRICH
Year of Publication 08.10.2009

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Patent

PROJEKTIONSBELICHTUNGSANLAGE MIT MINDESTENS EINEM INDIKATORBAUTEIL UND VERFAHREN ZUR ÜBERWACHUNG EINES ANLAGENRAUMS

PROJEKTIONSBELICHTUNGSANLAGE MIT MINDESTENS EINEM INDIKATORBAUTEIL UND VERFAHREN ZUR ÜBERWACHUNG EINES ANLAGENRAUMS

by Maltor, Holger, Kruithof, Wilbert, Ehm, Dirk Heinrich
Year of Publication 29.08.2019

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Patent

METHOD FOR CORRECTING THE SURFACE FORM OF A MIRROR

METHOD FOR CORRECTING THE SURFACE FORM OF A MIRROR

by EHM DIRK HEINRICH, SCHICKETANZ THOMAS, MUELLER JUERGEN
Year of Publication 20.03.2014

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Patent

Surface correction on coated mirrors

Surface correction on coated mirrors

by EHM DIRK HEINRICH, STICKEL FRANZ-JOSEF, MUELLER JUERGEN
Year of Publication 02.02.2016

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Patent

METHOD FOR REMOVING A CONTAMINATION LAYER BY AN ATOMIC LAYER ETCHING PROCESS

METHOD FOR REMOVING A CONTAMINATION LAYER BY AN ATOMIC LAYER ETCHING PROCESS

by EHM, Dirk Heinrich, TE SLIGTE, Edwin, CREIJGHTON, Yves Lodewijk Maria, ROOZEBOOM, Fred, BECKER, Moritz, ILLIBERI, Andrea
Year of Publication 10.01.2019

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Patent

Optisches Element und EUV-Lithographiesystem

Optisches Element und EUV-Lithographiesystem

by Schöll, Achim, Widmann, Daniel, Ehm, Dirk Heinrich
Year of Publication 18.04.2019

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Patent

Optische Baugruppe mit einer Spüleinrichtung und optische Anordnung damit

Optische Baugruppe mit einer Spüleinrichtung und optische Anordnung damit

by Bieg, Hermann, Ehm, Dirk Heinrich
Year of Publication 18.05.2017

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Patent

Method for production of micro-or nano-structured components such as optical element, involves irradiating photons and/or electrons according to the structure to be produced, so that full surface material compaction takes place

Method for production of micro-or nano-structured components such as optical element, involves irradiating photons and/or electrons according to the structure to be produced, so that full surface material compaction takes place

by SCHMIDT, STEFAN-WOLFGANG, EHM, DIRK HEINRICH
Year of Publication 13.06.2013

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Patent

EUV LITHOGRAPHY SYSTEM AND TRANSPORT DEVICE FOR TRANSPORTING A REFLECTIVE OPTICAL ELEMENT

EUV LITHOGRAPHY SYSTEM AND TRANSPORT DEVICE FOR TRANSPORTING A REFLECTIVE OPTICAL ELEMENT

by BECKER, MORITZ, MAREK, PETER, ALIREZA, AKBARINIA, EHM, DIRK HEINRICH
Year of Publication 25.06.2015

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Patent

EUV-Lithographiesystem

EUV-Lithographiesystem

by Ehm, Dirk Heinrich, Ament, Irene
Year of Publication 16.02.2017

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Patent

REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY

REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY

by EHM, Dirk Heinrich, AMENT, Irene, SCHMIDT, Stefan-Wolfgang, WINTER, Ralf, EVA, Eric, BECKER, Moritz, SHKLOVER, Vitaliy, URICH, Diana, KIEREY, Holger, WIESNER, Stefan, MEIER, Robert, JALICS, Christof
Year of Publication 06.06.2019

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Patent

REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY

REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY

by EHM, Dirk Heinrich, AMENT, Irene, SCHMIDT, Stefan-Wolfgang, WINTER, Ralf, EVA, Eric, BECKER, Moritz, SHKLOVER, Vitaliy, URICH, Diana, KIEREY, Holger, WIESNER, Stefan, MEIER, Robert, JALICS, Christof
Year of Publication 05.06.2019

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Patent

PROTECTION MODULE FOR EUV LITHOGRAPHY APPARATUS, AND EUV LITHOGRAPHY APPARATUS

PROTECTION MODULE FOR EUV LITHOGRAPHY APPARATUS, AND EUV LITHOGRAPHY APPARATUS

by LAUFER, Timo, NIEKEN, Ulrich, EHM, Dirk, Heinrich, KELLER, Franz, BANNEY, Ben, KUGLER, Jens
Year of Publication 14.06.2017

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Patent

A REFLECTIVE OPTICAL ELEMENT AND METHOD OF PRODUCING IT

A REFLECTIVE OPTICAL ELEMENT AND METHOD OF PRODUCING IT

by VAN KAMPEN, MAARTEN, VERBERK, ROGIER, EHM, DIRK, HEINRICH, HUIJBREGTSE, JEROEN
Year of Publication 27.05.2015

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Patent

METHOD FOR PRODUCING A CAPPING LAYER COMPOSED OF SILICON OXIDE ON AN EUV MIRROR, EUV MIRROR, AND EUV LITHOGRAPHY APPARATUS

METHOD FOR PRODUCING A CAPPING LAYER COMPOSED OF SILICON OXIDE ON AN EUV MIRROR, EUV MIRROR, AND EUV LITHOGRAPHY APPARATUS

by EHM, DIRK, HEINRICH, BLANCKENHAGEN, GISELA VON
Year of Publication 04.04.2013

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Patent

EUV MIRROR COMPRISING AN OXYNITRIDE CAPPING LAYER HAVING A STABLE COMPOSITION, EUV LITHOGRAPHY APPARATUS, AND OPERATING METHOD

EUV MIRROR COMPRISING AN OXYNITRIDE CAPPING LAYER HAVING A STABLE COMPOSITION, EUV LITHOGRAPHY APPARATUS, AND OPERATING METHOD

by EHM, DIRK HEINRICH, BLANCKENHAGEN, GISELA VON
Year of Publication 04.04.2013

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Patent

Optical arrangement, in particular in a projection exposure apparatus for EUV lithography

Optical arrangement, in particular in a projection exposure apparatus for EUV lithography

by EHM DIRK HEINRICH, SCHMIDT STEFAN-WOLFGANG, DENGEL GUENTHER
Year of Publication 26.05.2015

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Patent

REFLECTIVE OPTICAL ELEMENT

REFLECTIVE OPTICAL ELEMENT

by BECKER Moritz, AMENT Irene, EHM Dirk Heinrich, WEBER Joern, VON BLANCKENHAGEN Gisela
Year of Publication 08.06.2017

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Patent

Lithographic apparatus comprising an internal sensor and a mini-reactor, and method for treating a sensing surface of the internal sensor

Lithographic apparatus comprising an internal sensor and a mini-reactor, and method for treating a sensing surface of the internal sensor

by WOLSCHRIJN BASTIAAN THEODOOR, EHM DIRK HEINRICH, MOORS JOHANNES HUBERTUS JOSEPHINA
Year of Publication 25.03.2015

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Patent

Detection of contaminating substances in an EUV lithography apparatus

Detection of contaminating substances in an EUV lithography apparatus

by EHM DIRK HEINRICH, KRAUS DIETER, SCHMIDT STEFAN-WOLFGANG
Year of Publication 10.02.2015

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Patent

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