Search Results - "EHM DIRK HEINRICH" :: K.UTB vyhledávací portál

by EHM, Dirk Heinrich, TE SLIGTE, Edwin, CREIJGHTON, Yves Lodewijk Maria, ROOZEBOOM, Fred, BECKER, Moritz, ILLIBERI, Andrea
Year of Publication 13.05.2020

Get full text

Patent

Loading…

Optische Baugruppe mit einem Schutzelement und optische Anordnung damit

by Ehm, Dirk Heinrich
Year of Publication 04.05.2017

Get full text

Patent

Loading…

METHOD FOR REMOVING A CONTAMINATION LAYER BY AN ATOMIC LAYER ETCHING PROCESS

by EHM, Dirk Heinrich, TE SLIGTE, Edwin, CREIJGHTON, Yves Lodewijk Maria, ROOZEBOOM, Fred, BECKER, Moritz, ILLIBERI, Andrea
Year of Publication 07.05.2020

Get full text

Patent

Loading…

Optical assembly with suppression of degradation

by Schmidt Stefan-Wolfgang, Walter Markus, Ehm Dirk Heinrich
Year of Publication 25.04.2017

Get full text

Patent

Loading…

PELLIKEL FÜR PROJEKTIONSBELICHTUNGSANLAGEN MIT MEHREREN SCHICHTEN

by Ehm, Dirk Heinrich
Year of Publication 26.01.2017

Get full text

Patent

Loading…

OPTICAL ASSEMBLY, IN PARTICULAR IN A PROJECTION EXPOSURE SYSTEM FOR EUV LITHOGRAPHY

by Ehm, Dirk Heinrich, Kaller, Julian
Year of Publication 25.07.2018

Get full text

Patent

Loading…

Verfahren zur Instandhaltung einer Projektionsbelichtungsanlage, Servicemodul und Anordnung für die Halbleiterlithographie

by Modeste, Benjahman Julius, Ehm, Dirk Heinrich, Kugler, Jens, Nefzi, Marwene
Year of Publication 18.11.2021

Get full text

Patent

Loading…

EUV lithography system and operating method

by Schmidt, Stefan-Wolfgang, Te Sligte, Edwin, Ehm, Dirk Heinrich, Osorio, Edgar, Logtenberg, Hella, Zellenrath, Mark
Year of Publication 11.09.2018

Get full text

Patent

Loading…

Optical assembly, in particular in an EUV lithographic projection exposure apparatus

by EHM, DIRK HEINRICH, KALLER, JULIAN
Year of Publication 01.05.2018

Get full text

Patent

Loading…

Reflective optical element

by Von Blanckenhagen, Gisela, Becker, Moritz, Weber, Joern, Ehm, Dirk Heinrich, Ament, Irene
Year of Publication 28.08.2018

Get full text

Patent

Loading…

EUV MIRROR COMPRISING AN OXYNITRIDE CAPPING LAYER HAVING A STABLE COMPOSITION, EUV LITHOGRAPHY APPARATUS, AND OPERATING METHOD

by VON BLANCKENHAGEN GISELA, EHM DIRK HEINRICH
Year of Publication 31.07.2014

Get full text

Patent

Loading…

METHOD FOR PRODUCING A CAPPING LAYER COMPOSED OF SILICON OXIDE ON AN EUV MIRROR, EUV MIRROR, AND EUV LITHOGRAPHY APPARATUS

by VON BLANCKENHAGEN GISELA, EHM DIRK HEINRICH
Year of Publication 31.07.2014

Get full text

Patent

Loading…

Optical element and optical system for EUV lithography, and method for treating such an optical element

by Huijbregtse, Jeroen, Te Sligte, Edwin, Storm, Arnoldus Jan, Graber, Tina, Bekman, Hermanus Hendricus Petrus Theodorus, Ehm, Dirk Heinrich, Ament, Irene, Smeets, Dries, Kuznetsov, Alexey
Year of Publication 23.06.2020

Get full text

Patent

Loading…

Optische Anordnung, insbesondere in einer Projektionsbelichtungsanlage für die EUV-Lithographie

by Ehm, Dirk Heinrich, Kaller, Julian
Year of Publication 15.03.2018

Get full text

Patent

Loading…

Reflective optical element for EUV lithography

by Winter, Ralf, Jalics, Christof, Wiesner, Stefan, Meier, Robert, Eva, Eric, Schmidt, Stefan-Wolfgang, Becker, Moritz, Shklover, Vitaliy, Kierey, Holger, Urich, Diana, Ehm, Dirk Heinrich, Ament, Irene
Year of Publication 12.05.2020

Get full text

Patent

Refine Results

Format

Subject Area

Topic

Language

Year of Publication

Database