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Nanopatterning with UV Optical Lithography

Nanopatterning with UV Optical Lithography

by Rothschild, M., Bloomstein, T. M., Efremow, N., Fedynyshyn, T. H., Fritze, M., Pottebaum, I., Switkes, M.
Published in MRS bulletin (01.12.2005)

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Journal Article

Nanopatterning with UV optical lithography: Fabrication of Sub-45-nm structures for the next generation of devices

Nanopatterning with UV optical lithography: Fabrication of Sub-45-nm structures for the next generation of devices

by ROTHSCHILD, M, BLOOMSTEIN, T. M, EFREMOW, N. JR, FEDYNYSHYN, T. H, FRITZE, M, POTTEBAUM, I, SWITKES, M
Published in MRS bulletin (2005)

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Journal Article