A TEMPERATURE CONTROLLED SHOWER HEAD FOR A PROCESSING TOOL
EDMONDSON, Bryce Isaiah, ABEL, Joseph R, LEMAIRE, Paul C, MILLER, Aaron Blake, JONES, Christopher Matthew, DURBIN, Aaron
Year of Publication 07.03.2024
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Year of Publication 07.03.2024
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MODULAR VAPOR DELIVERY SYSTEM FOR SEMICONDUCTOR PROCESS TOOLS
EDMONDSON, Bryce Isaiah, BAMFORD, Thadeous, ABEL, Joseph R, LEMAIRE, Paul C, JONES, Christopher Matthew, STUMPF, John Folden, DURBIN, Aaron
Year of Publication 07.03.2024
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Year of Publication 07.03.2024
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DEPOSITION OF METAL-CONTAINING FILMS AND CHAMBER CLEAN
GANESAN, Jeya Prakash, BATZER, Rachel E, HAUSMANN, Dennis M, GUO, Tongtong, FUSTER, Hector Aaron, TA, Phuong Kim, AUSTIN, Dustin Zachary, VOLOSSKIY, Boris, JUAREZ, Francisco J, MCKERROW, Andrew John, EDMONDSON, Bryce Isaiah, KWAN, Matthew Palmer, HART, Kyle Watt, WANG, Yuxi, TENCE, David Alan, ERICKSON, Ann, KHOJASTEH, Malak, GONG, Bo, DRAPER, Emile C, JENG, Esther
Year of Publication 12.10.2023
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Year of Publication 12.10.2023
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A temperature controlled shower head for a processing tool
EDMONDSON, BRYCE ISAIAH, JONES, CHRISTOPHER MATTHEW, DURBIN, AARON, MILLER, AARON BLAKE, ABEL, JOSEPH R, LEMAIRE, PAUL C
Year of Publication 16.07.2024
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Year of Publication 16.07.2024
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Modular vapor delivery system for semiconductor process tools
EDMONDSON, BRYCE ISAIAH, JONES, CHRISTOPHER MATTHEW, DURBIN, AARON, BAMFORD, THADEOUS, ABEL, JOSEPH R, STUMPF, JOHN FOLDEN, LEMAIRE, PAUL C
Year of Publication 16.06.2024
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Year of Publication 16.06.2024
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Deposition of metal-containing films and chamber clean
WANG, YU-XI, ERICKSON, ANN, HAUSMANN, DENNIS M, TENCE, DAVID ALAN, MCKERROW, ANDREW JOHN, KHOJASTEH, MALAK, GONG, BO, GANESAN, JEYA PRAKASH, DRAPER, EMILE C, BATZER, RACHEL E, AUSTIN, DUSTIN ZACHARY, JENG, ESTHER, EDMONDSON, BRYCE ISAIAH, FUSTER, HECTOR AARON, VOLOSSKIY, BORIS, HART, KYLE WATT, GUO, TONG-TONG, KWAN, MATTHEW PALMER, JUAREZ, FRANCISCO J
Year of Publication 16.01.2024
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Year of Publication 16.01.2024
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