Linear and nonlinear equivalent circuit modeling of CMUTs
Lohfink, A., Eccardt, P.-C.
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.12.2005)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.12.2005)
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Journal Article
A resonant CMUT-based fluid sensor: Modeling and simulation
Thränhardt, M., Eccardt, P.-C., Mooshofer, H., Hauptmann, P.
Published in Sensors and actuators. A. Physical. (01.11.2009)
Published in Sensors and actuators. A. Physical. (01.11.2009)
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Journal Article
Coupled finite element and network simulation for microsystem components
ECCARDT, P.-C, KNOTH, M, EBEST, G, LANDES, H, CLAUSS, C, WÜNSCHE, S
Published in Microsystem technologies : sensors, actuators, systems integration (22.08.1997)
Published in Microsystem technologies : sensors, actuators, systems integration (22.08.1997)
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Journal Article
Micromachined ultrasound transducers with improved coupling factors from a CMOS compatible process
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Journal Article
Conference Proceeding
Derivation of a 1D CMUT model from FEM results for linear and nonlinear equivalent circuit simulation
Lohfink, A., Eccardt, P.-C., Benecke, W., Meixner, H.
Published in IEEE Symposium on Ultrasonics, 2003 (2003)
Published in IEEE Symposium on Ultrasonics, 2003 (2003)
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Conference Proceeding
Surface micromachined ultrasound transducers in CMOS technology
Eccardt, P.-C., Niederer, K., Scheiter, T., Hierold, C.
Published in 1996 IEEE Ultrasonics Symposium. Proceedings (1996)
Published in 1996 IEEE Ultrasonics Symposium. Proceedings (1996)
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Conference Proceeding
A resonant CMUT sensor for fluid applications
Thranhardt, M., Eccardt, P.-C., Mooshofer, H., Hauptmann, P., Degertekin, L.
Published in 2009 IEEE Sensors (01.10.2009)
Published in 2009 IEEE Sensors (01.10.2009)
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Conference Proceeding
Fabrication and characterization of a new capacitive micromachined ultrasonic transducer (cMUT) using polysilicon as membrane and sacrificial layer material
Buhrdorf, A., Lohfink, A., Junge, S., Eccardt, P.C., Benecke, W.
Published in IEEE Symposium on Ultrasonics, 2003 (2003)
Published in IEEE Symposium on Ultrasonics, 2003 (2003)
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Conference Proceeding
Finite element simulation of acoustic wave propagation within flowing media
Eccardt, P.-C., Landes, H., Lerch, R.
Published in 1996 IEEE Ultrasonics Symposium. Proceedings (1996)
Published in 1996 IEEE Ultrasonics Symposium. Proceedings (1996)
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Conference Proceeding
5F-1 Analytical Models for Micromachined Transducers - An Overview (Invited)
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Conference Proceeding
Ultraschall-Arrayantennen in Mikrotechnik
Sheljaskov, T., Niederer, K., Lerch, R., Eccardt, P. -C.
Published in Elektrotechnik und Informationstechnik (01.07.1998)
Published in Elektrotechnik und Informationstechnik (01.07.1998)
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Journal Article