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Year of Publication 22.05.2018
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Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature
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Year of Publication 26.10.2017
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Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
Van Boxtel Frank Johannes Jacobus, Alikhan Abdullah, Delmastro Peter A, Ebert Earl William, Nayfeh Samir A, Schuster Mark Josef, Burbank Daniel Nathan, Ward Christopher Charles, Verdirame Justin Matthew, Onvlee Johannes, Galburt Daniel Nicholas
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Year of Publication 19.09.2017
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Tunable wavelength illumination system
SEWELL HARRY, DEN BOEF ARIE JEFFREY, SINGH SANJEEV K, ANDERSEN KEITH, EBERT EARL WILLIAM
Year of Publication 20.05.2014
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Year of Publication 20.05.2014
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Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature
EBERT Earl William, SCHUSTER Mark Josef, WARD Christopher Charles, VERDIRAME Justin Matthew, ALIKHAN Abdullah, BURBANK Daniel Nathan, ONVLEE Johannes, NAYFEH Samir A, DELMASTRO Peter A, VAN BOXTEL Frank Johannes Jacobus, GALBURT Daniel Nicholas
Year of Publication 08.06.2017
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Year of Publication 08.06.2017
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Tunable Wavelength Illumination System
SEWELL HARRY, DEN BOEF ARIE JEFFREY, SINGH SANJEEV KUMAR, EBERT EARL WILLIAM, ANDRESEN KEITH WILLIAM
Year of Publication 03.10.2013
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Year of Publication 03.10.2013
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