Growth and morphology of cobalt nanoparticles on alumina
Dureuil, V, Ricolleau, C, Gandais, M, Grigis, C, Lacharme, J.P, Naudon, A
Published in Journal of crystal growth (01.12.2001)
Published in Journal of crystal growth (01.12.2001)
Get full text
Journal Article
Wafer bevel shape inducing high defect density in shallow trench isolation process
Dureuil, V, Baltzinger, J, Tastets, K, Vallier, L, Wlodarczyk, N, Bernaud, O, Leroueille, J, Mouroux, C
Published in 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.07.2010)
Published in 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.07.2010)
Get full text
Conference Proceeding
Phase transitions in Co nanoclusters grown by pulsed laser deposition
DUREUIL, V, RICOLLEAU, C, GANDAIS, M, GRIGIS, C
Published in The European physical journal. D, Atomic, molecular, and optical physics (01.04.2001)
Published in The European physical journal. D, Atomic, molecular, and optical physics (01.04.2001)
Get full text
Journal Article
Minimum power fail in high density structure improved by Chemical and Mechanical Polishing optimization
Denis, L., Dureuil, V., Fournier, C., Richou, G., Nogueira, F., Petit, D., Bostelmann, M., Comas, M., Dorval, D., Deconinck, P., Delahaye, B.
Published in 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2009)
Published in 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2009)
Get full text
Conference Proceeding
Edge and extreme edge wafer manufacturing on 200 mm wafer: Methodology, yield challenges, cost effective solutions, limitations
Delahaye, B., Baltzinger, J.L., Denis, L., Chantepie, S., Costaganna, P., Richou, G., Lariviere, S., Aonzo, F., Delabriere, S., Poli, F., Bru, C., Meyniel, J.B., Allais, F., Dureuil, V., Raffin, P., Rondey, E.
Published in 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2009)
Published in 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2009)
Get full text
Conference Proceeding