Wafer Scale Processing of Plasmonic Nanoslit Arrays in 200mm CMOS Fab Environment
Malachowski, Karl, Verbeeck, Rita, Dupont, Tania, Chen, Chang, Li, Yi, Musa, Silke, Stakenborg, Tim, Sabuncuoglu Tezcan, Deniz, Van Dorpe, Pol
Published in ECS transactions (15.03.2013)
Published in ECS transactions (15.03.2013)
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Journal Article
Wafer Scale Processing of Plasmonic Nanopore Arrays in 200mm CMOS Fab Environment
Malachowski, Karl, Verbeeck, Rita, Dupont, Tania, Chen, Chang, Musa, Silke, Li, Yi, Stakenborg, Tim, Sabuncuoglu, Deniz, Van Dorpe, Pol
Published in Meeting abstracts (Electrochemical Society) (04.06.2012)
Published in Meeting abstracts (Electrochemical Society) (04.06.2012)
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Journal Article