Test structures for the characterisation of MEMS and CMOS integration technology
Lin, H., Walton, A.J., Dunarc, C.C., Stevenson, J.T.M., Gundlach, A.M., Smith, S., Bunting, A.S.
Published in 2006 IEEE International Conference on Microelectronic Test Structures (2006)
Published in 2006 IEEE International Conference on Microelectronic Test Structures (2006)
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