Stripping of photoresist on silicon wafer by CO2 supercritical fluid
CHEN, Jian-Lian, WANG, Yeoung-Sheng, KUO, Hsin-I, SHU, Dun-Ying
Published in Talanta (Oxford) (15.09.2006)
Published in Talanta (Oxford) (15.09.2006)
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Journal Article
An extensive study for the impacts of structure-wise TSVs on position-oriented MOSFETs with TSV signal disturbance
Pei-Jer Tzeng, Chung-Chih Wang, Li-Hsin Chang, Shang-Chun Chen, Shang-Hung Shen, Chih-Ta Shen, Shih-Hui Wang, Sue-Chen Liao, Cha-Hsin Lin, Dun-Ying Shu, Chwan-Ying Lee, Ming-Jer Kao
Published in Proceedings of 2010 International Symposium on VLSI Technology, System and Application (01.04.2010)
Published in Proceedings of 2010 International Symposium on VLSI Technology, System and Application (01.04.2010)
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Conference Proceeding
Stripping of photoresist on silicon wafer by CO 2 supercritical fluid
Chen, Jian-Lian, Wang, Yeoung-Sheng, Kuo, Hsin-I, Shu, Dun-Ying
Published in Talanta (Oxford) (2006)
Published in Talanta (Oxford) (2006)
Get full text
Journal Article
Stripping of photoresist on silicon wafer by CO(2) supercritical fluid
Chen, Jian-Lian, Wang, Yeoung-Sheng, Kuo, Hsin-I, Shu, Dun-Ying
Published in Talanta (Oxford) (15.09.2006)
Published in Talanta (Oxford) (15.09.2006)
Get full text
Journal Article