Review of scaling effects on physical properties and practicalities of cantilever sensors
Yang, C-K, van der Drift, E W J M, French, P J
Published in Journal of micromechanics and microengineering (01.10.2022)
Published in Journal of micromechanics and microengineering (01.10.2022)
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Journal Article
Resist thickness effects on ultra thin HSQ patterning capabilities
Sidorkin, V., Grigorescu, A., Salemink, H., Drift, E. van der
Published in Microelectronic engineering (01.04.2009)
Published in Microelectronic engineering (01.04.2009)
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Journal Article
Conference Proceeding
Dry etching of SiC in inductively coupled Cl2/Ar plasma
Jiang, Liudi, Plank, N O V, Blauw, M A, Cheung, R, Drift, E van der
Published in Journal of physics. D, Applied physics (07.07.2004)
Published in Journal of physics. D, Applied physics (07.07.2004)
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Journal Article
Effects of Surface Stress on Nanocantilevers
Sadeghian, H., Yang, C. K., Gavan, K. Babaei, Goosen, J. F. L., E. W. J. M. van der Drift, H. S. J. van der Zant, French, P. J., Bossche, A., Keulen, F. van
Published in E-journal of surface science and nanotechnology (01.01.2009)
Published in E-journal of surface science and nanotechnology (01.01.2009)
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Journal Article
Impact of fabrication technology on flexural resonances of silicon nitride cantilevers
Gavan, K. Babaei, Westra, H.J.R., Van der Drift, E.W.J.M., Venstra, W.J., Van der Zant, H.S.J.
Published in Microelectronic engineering (01.04.2009)
Published in Microelectronic engineering (01.04.2009)
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Journal Article
Conference Proceeding
Temperature influence on etching deep holes with SF6/O2 cryogenic plasma
Craciun, G, Blauw, M A, Drift, E van der, Sarro, P M, French, P J
Published in Journal of micromechanics and microengineering (01.07.2002)
Published in Journal of micromechanics and microengineering (01.07.2002)
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Journal Article
Conference Proceeding
Amorphous silicon waveguides for microphotonics
de Dood, M. J. A., Polman, A., Zijlstra, T., van der Drift, E. W. J. M.
Published in Journal of applied physics (15.07.2002)
Published in Journal of applied physics (15.07.2002)
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Journal Article
The etching of silicon carbide in inductively coupled SF6/O2 plasma
Plank, N O V, Blauw, M A, Drift, E W J M van der, Cheung, R
Published in Journal of physics. D, Applied physics (07.03.2003)
Published in Journal of physics. D, Applied physics (07.03.2003)
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Journal Article
Effects of dry processing on the optical properties of GaN
Cheung, R., Reeves, R. J., Brown, S. A., van der Drift, E., Kamp, M.
Published in Journal of applied physics (15.12.2000)
Published in Journal of applied physics (15.12.2000)
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Journal Article
Wavelength tuning of planar photonic crystals by local processing of individual holes
Kicken, H H J E, Alkemade, P F A, van der Heijden, R W, Karouta, F, Nötzel, R, van der Drift, E, Salemink, H W M
Published in Optics express (23.11.2009)
Published in Optics express (23.11.2009)
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Journal Article
A study of reactive ion etching damage effects in GaN
Rong, B, Reeves, R.J, Brown, S.A, Alkaisi, M.M, van der Drift, E, Cheung, R, Sloof, W.G
Published in Microelectronic engineering (01.09.2001)
Published in Microelectronic engineering (01.09.2001)
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Journal Article
Conference Proceeding
Dry etching of SiC in inductively coupled Cl 2 /Ar plasma
Jiang, Liudi, Plank, N O V, Blauw, M A, Cheung, R, Drift, E van der
Published in Journal of physics. D, Applied physics (07.07.2004)
Published in Journal of physics. D, Applied physics (07.07.2004)
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Journal Article
Flux-line shear through narrow constraints in superconducting films
Pruymboom, A, Kes, PH, van der Drift E, Radelaar, S
Published in Physical review letters (04.04.1988)
Published in Physical review letters (04.04.1988)
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Journal Article
Experimental study on magnetoresistance phenomena in n-type Si/SiGe quantum wires
Veen, R G van, Verbruggen, A H, Drift, E van der, Schäffler, F, Radelaar, S
Published in Semiconductor science and technology (01.06.1999)
Published in Semiconductor science and technology (01.06.1999)
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