Complete Fabrication of a Traversable 3 µm Thick NbN Film Superconducting Coil with Cu plated layer of 42m in Length in a Spiral Three-Storied Trench Engraved in a Si Wafer of 76.2 mm in Diameter Formed by MEMS Technology for a Compact SMES with High Energy Storage Volume Density
Suzuki, Yasuhiro, Iguchi, Nobuhiro, Adachi, Kazuhiro, Ichiki, Akihisa, Hioki, Tatsumi, Hsu, Che-Wei, Sato, Ryoto, Kumagai, Shinya, Sasaki, Minoru, Noh, Joo-Hyong, Sakurahara, Yuuske, Okabe, Kyohei, Takai, Osamu, Honma, Hideo, Watanabe, Hideo, Sakoda, Hitoshi, Sasagawa, Hiroaki, Doy, Hideyuki, Zhou, Shuliang, Hori, H., Nishikawa, Shigeaki, Nozaki, Toshihiro, Sugimoto, Noriaki, Motohiro, Tomoyoshi
Published in Journal of physics. Conference series (01.09.2017)
Published in Journal of physics. Conference series (01.09.2017)
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