Additive-Driven Phase-Selective Chemistry in Block Copolymer Thin Films: The Convergence of Top-Down and Bottom-Up Approaches
Du, P., Li, M., Douki, K., Li, X., Garcia, C. B. W., Jain, A., Smilgies, D.-M., Fetters, L. J., Gruner, S. M., Wiesner, U., Ober, C. K.
Published in Advanced materials (Weinheim) (17.06.2004)
Published in Advanced materials (Weinheim) (17.06.2004)
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Journal Article
Spatially Controlled Fabrication of Nanoporous Block Copolymers
Li, Mingqi, Douki, Katsuji, Goto, Ken, Li, Xuefa, Coenjarts, Christopher, Smilgies, Detlef M, Ober, Christopher K
Published in Chemistry of materials (05.10.2004)
Published in Chemistry of materials (05.10.2004)
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Journal Article
Tailoring Transparency of Imageable Fluoropolymers at 157 nm by Incorporation of Hexafluoroisopropyl Alcohol to Photoresist Backbones
Bae, Young C, Douki, Katsuji, Yu, Tianyue, Dai, Junyan, Schmaljohann, Dirk, Koerner, Hilmar, Ober, Christopher K, Conley, Will
Published in Chemistry of materials (18.03.2002)
Published in Chemistry of materials (18.03.2002)
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Journal Article
New Strategies for High Resolution Photoresists
Ober, Christopher K., Douki, Katsuji, Vohra, Vaishali R., Kwark, Young-Je, Liu, Xiang-Qian, Conley, Will, Miller, Daniel, Zimmerman, Paul
Published in Journal of Photopolymer Science and Technology (01.01.2002)
Published in Journal of Photopolymer Science and Technology (01.01.2002)
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Journal Article
Lithographic Patterning with Block Copolymers
Ober, Christopher K., Li, Mingqi, Douki, Katsuji, Goto, Ken, Li, Xuefa
Published in Journal of Photopolymer Science and Technology (01.01.2003)
Published in Journal of Photopolymer Science and Technology (01.01.2003)
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Journal Article
Strategies for High Transparency Acrylate Resists for 157 nm Lithography
Jakúbek, Vladimír, Liu, Xiang-Qian, Vohra, Vaishali R., Douki, Katsuji, Kwark, Young-Je, Ober, Christopher K., Markley, Thomas J., Robertson, Eric A., III, Carr, Richard V.C., Marsella, John A., Conley, Will, Miller, Daniel, Zimmerman, Paul
Published in Journal of Photopolymer Science and Technology (01.01.2003)
Published in Journal of Photopolymer Science and Technology (01.01.2003)
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