Laser–plasma simulations of astrophysical phenomena and novel applications to semiconductor annealing
GRUN, J., LAMING, M., MANKA, C., DONNELLY, D.W., COVINGTON, B.C., FISCHER, R.P., VELIKOVICH, A., KHOKHLOV, A.
Published in Laser and particle beams (01.10.2003)
Published in Laser and particle beams (01.10.2003)
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Journal Article
Athermal annealing of ion-implanted silicon
Donnelly, D.W., Covington, B.C., Grun, J., Fischer, R.P., Peckerar, M., Felix, C.L., Djordjevic, B.B., Mignogna, R., Meyer, J.R., Ting, A., Manka, C.K.
Published in 9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001 (2001)
Published in 9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001 (2001)
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Conference Proceeding