Ultrasoft X-Ray Emission Spectroscopic Analysis for Effects of Vacuum Ultraviolet Rare Gas Excimer Laser Irradiation on Silicon Nitride Films
Kurmaev, Ernst Z., Shamin, Sergei N., Dolgih, Vitalij E., Kurosawa, Kou, Nakamae, Kazuo, Takigawa, Yasuo, Kameyama, Akihiro, Yokotani, Atsushi, Sasaki, Wataru
Published in Japanese Journal of Applied Physics (1994)
Published in Japanese Journal of Applied Physics (1994)
Get full text
Journal Article