Charge Transport Mechanism and Trap Origin in Methyl‐Terminated Organosilicate Glass Low‐κ Dielectrics
Perevalov, Timofey V., Gismatulin, Andrei A., Dolbak, Andrei E., Gritsenko, Vladimir A., Trofimova, Elena S., Pustovarov, Vladimir A., Seregin, Dmitry S., Vorotilov, Konstantin A., Baklanov, Mikhail R.
Published in Physica status solidi. A, Applications and materials science (01.02.2021)
Published in Physica status solidi. A, Applications and materials science (01.02.2021)
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