On-chip monitoring of MEMS gear motion
Tanner, D.M., Swanson, S.E., Walraven, J.A., Dohner, J.L.
Published in 2003 IEEE International Reliability Physics Symposium Proceedings, 2003. 41st Annual (2003)
Published in 2003 IEEE International Reliability Physics Symposium Proceedings, 2003. 41st Annual (2003)
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