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Year of Publication 27.02.2020
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Year of Publication 27.02.2020
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Year of Publication 28.01.2020
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Electrostatic chuck assembly having a dielectric filler
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Year of Publication 10.12.2019
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Year of Publication 10.12.2019
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Electrostatic Chuck Assembly Having A Dielectric Filler
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Year of Publication 25.10.2018
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Year of Publication 25.10.2018
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Etching oxide-nitride stacks using C4F6H2
Kim Jong Mun, Ling Li, Huang Yuju, Payyapilly Jairaj, Shimizu Daisuke, Doan Kenny L, Nemani Srinivas D
Year of Publication 29.08.2017
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Year of Publication 29.08.2017
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PROCESS KIT FOR EDGE CRITICAL DIMENSION UNIFORMITY CONTROL
DOAN, KENNY LINH, NOORBAKHSH, HAMID, ROSA, JASON DELLA, KIM, JONG MUN
Year of Publication 31.12.2014
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Year of Publication 31.12.2014
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