Study of the deposition of Ti/TiN multilayers by magnetron sputtering
Saoula, N., Djerourou, S., Yahiaoui, K., Henda, K., Kesri, R., Erasmus, R. M., Comins, J. D.
Published in Surface and interface analysis (01.06.2010)
Published in Surface and interface analysis (01.06.2010)
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Journal Article
Electrical And OES Diagnostics Of A Magnetized RF Discharge In CH4 Created By A Multihole Cathode Used For a-C:H Deposition
Djerourou, S, Henda, K, Ouchabane, M
Published in Laser and Plasma Applications in Materials Science (AIP Conference Proceedings Volume 1047) (01.01.2008)
Published in Laser and Plasma Applications in Materials Science (AIP Conference Proceedings Volume 1047) (01.01.2008)
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Journal Article