Measuring the fine structure constant using helium fine structure
Shiner, D.L., Dixson, R.
Published in IEEE transactions on instrumentation and measurement (01.04.1995)
Published in IEEE transactions on instrumentation and measurement (01.04.1995)
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Conference Proceeding
A chopped high intensity muon beam at the Stopped Muon Channel at LAMPF
Ciskowski, D., Ahn, H., Dixson, R., Fei, X., Hughes, V.W., Matthias, B.E., Pillai, C., Woodle, K.
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (01.09.1993)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (01.09.1993)
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Journal Article
Problems in surface metrology
Vorburger, T.V., Dixson, R.G., Tsai, V., Doi, T., Song, J.F., Renegar, T.B., Fu, J.
Published in International journal of machine tools & manufacture (01.05.1998)
Published in International journal of machine tools & manufacture (01.05.1998)
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Journal Article
Recent developments in electrical linewidth and overlay metrology for integrated circuit fabrication processes
CRESSWELL, M. W, SNIEGOWSKI, J. J, GHOSHTAGORE, R. N, ALLEN, R. A, GUTHRIE, W. F, GURNELL, A. W, LINHOLM, L. W, DIXSON, R. G, TEAGUE, E. C
Published in Japanese Journal of Applied Physics (01.12.1996)
Published in Japanese Journal of Applied Physics (01.12.1996)
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Conference Proceeding
Journal Article
Comparison of SEM and HRTEM CD Measurements Extracted From Test Structures Having Feature Linewidths From 40 to 240 nm
Cresswell, M.W., Allen, R.A., Guthrie, W.F., Murabito, C.E., Dixson, R.G., Hunt, A.
Published in IEEE transactions on instrumentation and measurement (01.01.2008)
Published in IEEE transactions on instrumentation and measurement (01.01.2008)
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Algorithms for calculating single-atom step heights
Fu, Joseph, Tsai, Vincent, Köning, Rainer, Dixson, Ronald, Vorburger, Theodore
Published in Nanotechnology (01.12.1999)
Published in Nanotechnology (01.12.1999)
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Journal Article
Comparison of Measurement Techniques for Linewidth Metrology on Advanced Photomasks
Smith, S., Tsiamis, A., McCallum, M., Hourd, A.C., Stevenson, J.T.M., Walton, A.J., Dixson, R.G., Allen, R.A., Potzick, J.E., Cresswell, M.W., Orji, N.G.
Published in IEEE transactions on semiconductor manufacturing (01.02.2009)
Published in IEEE transactions on semiconductor manufacturing (01.02.2009)
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Journal Article
Comparison of measurement techniques for advanced photomask metrology
Smith, S., Tsiamis, A., McCallum, M., Hourd, A.C., Stevenson, J.T.M., Walton, A., Dixson, R.G., Allen, R.A., Potzick, J.E., Cresswell, M.W., Orji, N.G.
Published in 2008 IEEE International Conference on Microelectronic Test Structures (01.03.2008)
Published in 2008 IEEE International Conference on Microelectronic Test Structures (01.03.2008)
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Conference Proceeding
Study of Test Structures for Use as Reference Materials for Optical Critical Dimension Applications
Allen, R.A., Patrick, H.J., Bishop, M., Germer, T.A., Dixson, R., Guthrie, W.F., Cresswell, W.
Published in 2007 IEEE International Conference on Microelectronic Test Structures (01.03.2007)
Published in 2007 IEEE International Conference on Microelectronic Test Structures (01.03.2007)
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Conference Proceeding
Line edge roughness metrology using atomic force microscopes
Orji, Ndubuisi G, Vorburger, Theodore V, Fu, Joseph, Dixson, Ronald G, Nguyen, Cattien V, Raja, Jayaraman
Published in Measurement science & technology (01.11.2005)
Published in Measurement science & technology (01.11.2005)
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