Spectroscopic ellipsometry studies of 3-stage deposition of CuIn1−xGaxSe2 on Mo-coated glass and stainless steel substrates
Sunkoju, Sravan, Schujman, Sandra, Dixit, Dhairya, Diebold, Alain, Li, Jian, Collins, Robert, Haldar, Pradeep
Published in Thin solid films (01.05.2016)
Published in Thin solid films (01.05.2016)
Get full text
Journal Article
Characterization of Overlay and Tilt in Advanced Technology Nodes using Scatterometry
Dixit, Dhairya, Dey, Sonal, Kagalwala, Taher, Timoney, Padraig, Ramnath, Yudesh, Elia, Alexander, Paranjape, Ninad, Keller, Nick, Vaid, Alok
Published in 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2019)
Published in 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2019)
Get full text
Conference Proceeding
Metrology manufacturing control factors: A holistic approach for supporting 14nm and 7nm
Jayez, David, Vaid, Alok, Solecky, Eric, Lenahan, Michael, Dixit, Dhairya, Largo, Charles, Vakas, Georgios, Seipp, Steve
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
Get full text
Conference Proceeding
Mueller matrix optical scatterometry of Si fins patterned using directed self-assembly block copolymer line arrays
Dixit, Dhairya, Medikonda, Manasa, Diebold, Alain C., Peterson, Brennan, Race, Joseph
Published in 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) (01.05.2014)
Published in 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) (01.05.2014)
Get full text
Conference Proceeding