Large area and three-dimensional deposition of diamond-like carbon films for industrial applications
Roth, D., Rau, B., Roth, S., Mai, J., Dittrich, K.-H.
Published in Surface & coatings technology (01.10.1995)
Published in Surface & coatings technology (01.10.1995)
Get full text
Journal Article
Conference Proceeding
Plasma etching for industrial in-line processing of c-Si solar cells
Rentsch, J., Emanuel, G., Schetter, C., Aumann, T., Theirich, D., Gentischer, J., Roth, K., Fritzsche, M., Dittrich, K.-H., Preu, R.
Published in 3rd World Conference onPhotovoltaic Energy Conversion, 2003. Proceedings of (2003)
Get full text
Published in 3rd World Conference onPhotovoltaic Energy Conversion, 2003. Proceedings of (2003)
Conference Proceeding