Systematic study of shallow junction formation on germanium substrates
Hellings, Geert, Rosseel, Erik, Clarysse, Trudo, Petersen, Dirch Hjorth, Hansen, Ole, Nielsen, Peter Folmer, Simoen, Eddy, Eneman, Geert, De Jaeger, Brice, Hoffmann, Thomas, De Meyer, Kristin, Vandervorst, Wilfried
Published in Microelectronic engineering (01.04.2011)
Published in Microelectronic engineering (01.04.2011)
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Journal Article
Conference Proceeding
Optimized Laser Thermal Annealing on Germanium for High Dopant Activation and Low Leakage Current
Shayesteh, Maryam, O'Connell, Dan, Gity, Farzan, Murphy-Armando, Philip, Ran Yu, Huet, Karim, Toque-Tresonne, Ines, Cristiano, Fuccio, Boninelli, Simona, Henrichsen, Henrik Hartmann, Nielsen, Peter Folmer, Petersen, Dirch Hjorth, Duffy, Ray
Published in IEEE transactions on electron devices (01.12.2014)
Published in IEEE transactions on electron devices (01.12.2014)
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Journal Article
Selective Direct Laser Writing of Pyrolytic Carbon Microelectrodes in Absorber-Modified SU-8
Ludvigsen, Emil, Pedersen, Nina Ritter, Zhu, Xiaolong, Marie, Rodolphe, Mackenzie, David M. A., Emnéus, Jenny, Petersen, Dirch Hjorth, Kristensen, Anders, Keller, Stephan Sylvest
Published in Micromachines (Basel) (17.05.2021)
Published in Micromachines (Basel) (17.05.2021)
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Journal Article
Towards diamond micro four-point probes
Han, Anpan, Henrichsen, Henrik Hartmann, Savenko, Aleksei, Petersen, Dirch Hjorth, Hansen, Ole
Published in Micro and Nano Engineering (01.12.2019)
Published in Micro and Nano Engineering (01.12.2019)
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Journal Article
Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes
Østerberg, Frederik Westergaard, Witthøft, Maria-Louise, Dutta, Shibesh, Meersschaut, Johan, Adelmann, Christoph, Nielsen, Peter Folmer, Hansen, Ole, Petersen, Dirch Hjorth
Published in AIP advances (01.05.2018)
Published in AIP advances (01.05.2018)
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Journal Article
In Situ Tuning of Focused-Ion-Beam Defined Nanomechanical Resonators Using Joule Heating
Homann, L. V., Booth, T., Lei, A., Petersen, D. H., Davis, Z. J., Boggild, P.
Published in Journal of microelectromechanical systems (01.10.2011)
Published in Journal of microelectromechanical systems (01.10.2011)
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Journal Article
Deconvolution of heat sources for application in thermoelectric micro four-point probe measurements
Lamba, Neetu, Guralnik, Benny, Beltrán-Pitarch, Braulio, Rosendal, Victor, Pryds, Nini, Hansen, Ole, Petersen, Dirch Hjorth
Published in International journal of thermal sciences (01.02.2024)
Published in International journal of thermal sciences (01.02.2024)
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Journal Article
Quality assessment of terahertz time-domain spectroscopy transmission and reflection modes for graphene conductivity mapping
Mackenzie, David M A, Whelan, Patrick R, Bøggild, Peter, Jepsen, Peter Uhd, Redo-Sanchez, Albert, Etayo, David, Fabricius, Norbert, Petersen, Dirch Hjorth
Published in Optics express (02.04.2018)
Published in Optics express (02.04.2018)
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Journal Article
Reversible hysteresis inversion in MoS2 field effect transistors
Kaushik, Naveen, Mackenzie, David M. A., Thakar, Kartikey, Goyal, Natasha, Mukherjee, Bablu, Boggild, Peter, Petersen, Dirch Hjorth, Lodha, Saurabh
Published in NPJ 2D materials and applications (18.10.2017)
Published in NPJ 2D materials and applications (18.10.2017)
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Journal Article
Simulated SAM A-scans on multilayer MEMS components
Janting, Jakob, Hjorth Petersen, Dirch, Greisen, Christoffer
Published in Microelectronics and reliability (01.09.2002)
Published in Microelectronics and reliability (01.09.2002)
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Journal Article
Ultra-high aspect ratio replaceable AFM tips using deformation-suppressed focused ion beam milling
Savenko, Alexey, Yildiz, Izzet, Petersen, Dirch Hjorth, Bøggild, Peter, Bartenwerfer, Malte, Krohs, Florian, Oliva, Maria, Harzendorf, Torsten
Published in Nanotechnology (22.11.2013)
Published in Nanotechnology (22.11.2013)
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Journal Article
Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy
Whelan, Patrick R, Zhou, Binbin, Bezencenet, Odile, Shivayogimath, Abhay, Mishra, Neeraj, Shen, Qian, Jessen, Bjarke S, Pasternak, Iwona, Mackenzie, David M A, Ji, Jie, Sun, Cunzhi, Seneor, Pierre, Dlubak, Bruno, Luo, Birong, Østerberg, Frederik W, Huang, Deping, Shi, Haofei, Luo, Da, Wang, Meihui, Ruoff, Rodney S, Conran, Ben R, McAleese, Clifford, Huyghebaert, Cedric, Brems, Steven, Booth, Timothy J, Napal, Ilargi, Strupinski, Wlodek, Petersen, Dirch H, Forti, Stiven, Coletti, Camilla, Jouvray, Alexandre, Teo, Kenneth B K, Centeno, Alba, Zurutuza, Amaia, Legagneux, Pierre, Jepsen, Peter U, Bøggild, Peter
Published in 2d materials (17.02.2021)
Published in 2d materials (17.02.2021)
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Journal Article
Characterization of positional errors and their influence on micro four-point probe measurements on a 100 nm Ru film
Kjaer, Daniel, Hansen, Ole, Østerberg, Frederik Westergaard, Henrichsen, Henrik Hartmann, Markvardsen, Christian, Nielsen, Peter Folmer, Petersen, Dirch Hjorth
Published in Measurement science & technology (01.09.2015)
Published in Measurement science & technology (01.09.2015)
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Journal Article
Customizable in situ TEM devices fabricated in freestanding membranes by focused ion beam milling
Lei, Anders, Petersen, Dirch Hjorth, Booth, Timothy John, Homann, Lasse Vinther, Kallesoe, Christian, Sukas, Ozlem Sardan, Gyrsting, Yvonne, Molhave, Kristian, Boggild, Peter
Published in Nanotechnology (08.10.2010)
Published in Nanotechnology (08.10.2010)
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Journal Article
Study of the roughness in a photoresist masked, isotropic, SF6-based ICP silicon etch
Larsen, Kristian P, Petersen, Dirch Hjorth, Hansen, Ole
Published in Journal of the Electrochemical Society (01.01.2006)
Published in Journal of the Electrochemical Society (01.01.2006)
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Journal Article
Electron-vacancy scattering in SrNbO$_3$ and SrTiO$_3$: A DFT-NEGF study
Rosendal, Victor, Pryds, Nini, Petersen, Dirch Hjorth, Brandbyge, Mads
Year of Publication 11.01.2024
Year of Publication 11.01.2024
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Journal Article