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Year of Publication 25.08.2022
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Year of Publication 25.09.2015
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Year of Publication 13.03.2014
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Year of Publication 26.09.2024
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Year of Publication 21.12.2017
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Year of Publication 21.12.2017
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Multiple thermal CVD chambers with common gas delivery and exhaust system
YE ZHIYUAN, CHU SCHUBERT S, WASHINGTON, LORI, HILKENE MARTIN A, MYO NYI O, LAU SHU-KWAN, COLLINS RICHARD O, BURROWS BRIAN H, DINIZ HERMAN, HEMKA, MANISH
Year of Publication 14.10.2022
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Year of Publication 14.10.2022
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Year of Publication 04.01.2018
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Year of Publication 04.01.2018
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QUARTZ UPPER AND LOWER DOMES
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Year of Publication 29.11.2017
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Year of Publication 29.11.2017
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Quartz upper and lower domes
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Year of Publication 19.09.2017
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Year of Publication 19.09.2017
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