Probing the Interactions between CeO 2 Nanoparticles and Cleaning Chemistry Relevant to Post STI CMP Cleaning
Zubi, Tala B, Graverson, Carolyn F, Sherry, Brian M, Keleher, Jason J., Dickmann, Dan S, Her, Bob, Urban, Nathaniel D
Published in Meeting abstracts (Electrochemical Society) (13.04.2018)
Published in Meeting abstracts (Electrochemical Society) (13.04.2018)
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Journal Article
Probing Oxide-Nitride Selectivity As a Function of CeO 2 Valence State Relevant to STI CMP
Sherry, Brian M, Wortman-Otto, Katherine M, Mikos, Allie M, Keleher, Jason J., Dickmann, Dan S, Her, Bob, Urban, Nathaniel D
Published in Meeting abstracts (Electrochemical Society) (13.04.2018)
Published in Meeting abstracts (Electrochemical Society) (13.04.2018)
Get full text
Journal Article