Design and Characterization of 5 μm Pitch InGaAs Photodiodes Using In Situ Doping and Shallow Mesa Architecture for SWIR Sensing
Tillement, Jules, Cervera, Cyril, Baylet, Jacques, Jany, Christophe, Nardelli, François, Di Rito, Thomas, Georges, Sylvain, Mugny, Gabriel, Saxod, Olivier, Gravrand, Olivier, Baron, Thierry, Roy, François, Boeuf, Frédéric
Published in Sensors (Basel, Switzerland) (01.11.2023)
Published in Sensors (Basel, Switzerland) (01.11.2023)
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