Role of Ge and Si substrates in higher-k tetragonal phase formation and interfacial properties in cyclical atomic layer deposition-anneal Hf1−xZrxO2/Al2O3 thin film stacks
Dey, Sonal, Tapily, Kandabara, Consiglio, Steven, Clark, Robert D., Wajda, Cory S., Leusink, Gert J., Woll, Arthur R., Diebold, Alain C.
Published in Journal of applied physics (28.09.2016)
Published in Journal of applied physics (28.09.2016)
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Journal Article
On-Demand CMOS-Compatible Fabrication of Ultrathin Self-Aligned SiC Nanowire Arrays
Tabassum, Natasha, Kotha, Mounika, Kaushik, Vidya, Ford, Brian, Dey, Sonal, Crawford, Edward, Nikas, Vasileios, Gallis, Spyros
Published in Nanomaterials (Basel, Switzerland) (05.11.2018)
Published in Nanomaterials (Basel, Switzerland) (05.11.2018)
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Journal Article
Soft Elasticity in Main Chain Liquid Crystal Elastomers
Dey, Sonal, Agra-Kooijman, Dena, Ren, Wanting, McMullan, Philip, Griffin, Anselm, Kumar, Satyendra
Published in Crystals (01.06.2013)
Published in Crystals (01.06.2013)
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Journal Article
Book Review
Novel highly ordered core–shell nanoparticles
Dey, Sonal, Hossain, Mohammad D., Mayanovic, Robert A., Wirth, Richard, Gordon, Robert A.
Published in Journal of materials science (01.02.2017)
Published in Journal of materials science (01.02.2017)
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Journal Article
Novel highly ordered core–shell nanoparticles
Dey, Sonal, Hossain, Mohammad D., Mayanovic, Robert A., Wirth, Richard, Gordon, Robert A.
Published in Journal of materials science (26.10.2016)
Published in Journal of materials science (26.10.2016)
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Journal Article
Studies of the mechanical and extreme hydrothermal properties of periodic mesoporous silica and aluminosilica materials
Kizzire, Dayton G., Dey, Sonal, Mayanovic, Robert A., Sakidja, Ridwan, Landskron, Kai, Mandal, Manik, Wang, Zhongwu, Benamara, Mourad
Published in Microporous and mesoporous materials (01.11.2017)
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Published in Microporous and mesoporous materials (01.11.2017)
Journal Article
Studies of the mechanical and extreme hydrothermal properties of periodic mesoporous silica and aluminosilica materials
Kizzire, Dayton G., Dey, Sonal, Mayanovic, Robert A., Sakidja, Ridwan, Landskron, Kai, Mandal, Manik, Wang, Zhongwu, Benamara, Mourad
Published in Microporous and mesoporous materials (01.11.2017)
Published in Microporous and mesoporous materials (01.11.2017)
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Journal Article
Experimental and theoretical investigation of a mesoporous KxWO3 material having superior mechanical strength
Dey, Sonal, Anderson, Sean T., Mayanovic, Robert A., Sakidja, Ridwan, Landskron, Kai, Kokoszka, Berenika, Mandal, Manik, Wang, Zhongwu
Published in Nanoscale (07.02.2016)
Published in Nanoscale (07.02.2016)
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Journal Article
Synthesis, characterization, and ecotoxicity of CeO2 nanoparticles with differing properties
Alam, Bushra, Philippe, Allan, Rosenfeldt, Ricki R., Seitz, Frank, Dey, Sonal, Bundschuh, Mirco, Schaumann, Gabriele E., Brenner, Sara A.
Published in Journal of nanoparticle research : an interdisciplinary forum for nanoscale science and technology (01.10.2016)
Published in Journal of nanoparticle research : an interdisciplinary forum for nanoscale science and technology (01.10.2016)
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Journal Article
Experimental and theoretical investigation of a mesoporous KxWO3 material having superior mechanical strengthElectronic supplementary information (ESI) available: Experimental details of SEM and TEM measurements, SAXS data analysis, the procedure for Rietveld refinement, peak fitting for the Raman results, the modelling approach, UV-Vis and N2 sorption measurements. See DOI: 10.1039/c5nr07941a
Dey, Sonal, Anderson, Sean T, Mayanovic, Robert A, Sakidja, Ridwan, Landskron, Kai, Kokoszka, Berenika, Mandal, Manik, Wang, Zhongwu
Year of Publication 28.01.2016
Year of Publication 28.01.2016
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Journal Article
Experimental and theoretical investigation of a mesoporous K sub(x)WO sub(3) material having superior mechanical strength
Dey, Sonal, Anderson, Sean T, Mayanovic, Robert A, Sakidja, Ridwan, Landskron, Kai, Kokoszka, Berenika, Mandal, Manik, Wang, Zhongwu
Published in Nanoscale (01.01.2016)
Published in Nanoscale (01.01.2016)
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Journal Article
Experimental and theoretical investigation of a mesoporous K x WO 3 material having superior mechanical strength
Dey, Sonal, Anderson, Sean T., Mayanovic, Robert A., Sakidja, Ridwan, Landskron, Kai, Kokoszka, Berenika, Mandal, Manik, Wang, Zhongwu
Published in Nanoscale (2016)
Published in Nanoscale (2016)
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Journal Article
Characterization of Overlay and Tilt in Advanced Technology Nodes using Scatterometry
Dixit, Dhairya, Dey, Sonal, Kagalwala, Taher, Timoney, Padraig, Ramnath, Yudesh, Elia, Alexander, Paranjape, Ninad, Keller, Nick, Vaid, Alok
Published in 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2019)
Published in 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2019)
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Conference Proceeding
Atomic Layer Deposition of Ultrathin TaN and Ternary Ta[subscript 1-X]Al[subscript X]N[subscript y] Films for Cu Diffusion Barrier Applications in Advanced Interconnects
Consiglio, Steven, Yu, Kyle, Dey, Sonal, Tapily, Kandabara, Clark, Robert D., Hasegawa, Toshio, Wajda, Cory S., Leusink, Gert J., Diebold, Alain C.
Published in ECS transactions (08.07.2016)
Published in ECS transactions (08.07.2016)
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Journal Article
Electrically Scaled Hafnium Oxide Based Ge Devices
Tapily, Kandabara, Dey, Sonal, Consiglio, Steven, Clark, Robert D., Wajda, Cory S., Leusink, Gert J., Diebold, Alain C.
Published in ECS transactions (19.08.2016)
Published in ECS transactions (19.08.2016)
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Journal Article
Atomic Layer Deposition of Ultrathin TaN and Ternary Ta 1-X Al X N y Films for Cu Diffusion Barrier Applications in Advanced Interconnects
Consiglio, Steven, Yu, Kyle, Dey, Sonal, Tapily, Kandabara, Clark, Robert D., Hasegawa, Toshio, Wajda, Cory S., Leusink, Gert J., Diebold, Alain C.
Published in ECS transactions (10.09.2015)
Published in ECS transactions (10.09.2015)
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Journal Article
Experimental and theoretical investigation of a mesoporous K(x)WO3 material having superior mechanical strength
Dey, Sonal, Anderson, Sean T, Mayanovic, Robert A, Sakidja, Ridwan, Landskron, Kai, Kokoszka, Berenika, Mandal, Manik, Wang, Zhongwu
Published in Nanoscale (07.02.2016)
Published in Nanoscale (07.02.2016)
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Journal Article
Atomic Layer Deposition of Ultrathin TaN and Ternary Ta1-XAlXNy Films for Cu Diffusion Barrier Applications in Advanced Interconnects
Consiglio, Steven, Yu, Kyle, Dey, Sonal, Tapily, Kandabara, Clark, Robert D., Hasegawa, Toshio, Wajda, Cory S., Leusink, Gert J., Diebold, Alain C.
Published in ECS transactions (2015)
Published in ECS transactions (2015)
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Journal Article
Investigations of the Mechanical and Hydrothermal Stabilities of SBA-15 and Al-SBA-15 Mesoporous Materials
Kizzire, Dayton G., Thomas, James, Dey, Sonal, Osman, Hayley, Mayanovic, Robert A., Sakidja, Ridwan, Wang, Zhongwu, Mandal, Manik, Landskron, Kai
Published in MRS advances (01.01.2016)
Published in MRS advances (01.01.2016)
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Journal Article