Modification mechanisms of silicon thin films in low-temperature hydrogen plasmas
Martirosyan, V, Joubert, O, Despiau-Pujo, E
Published in Journal of physics. D, Applied physics (30.01.2019)
Published in Journal of physics. D, Applied physics (30.01.2019)
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Journal Article
Pulsed Cl 2 /Ar inductively coupled plasma processing: 0D model versus experiments
Despiau-Pujo, E, Brihoum, M, Bodart, P, Darnon, M, Cunge, G
Published in Journal of physics. D, Applied physics (12.11.2014)
Published in Journal of physics. D, Applied physics (12.11.2014)
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Journal Article
Pulsed Cl2/Ar inductively coupled plasma processing: 0D model versus experiments
Despiau-Pujo, E, Brihoum, M, Bodart, P, Darnon, M, Cunge, G
Published in Journal of physics. D, Applied physics (12.11.2014)
Published in Journal of physics. D, Applied physics (12.11.2014)
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Journal Article
Comparison between fluid simulations and experiments in inductively coupled argon/chlorine plasmas
Corr, C S, Despiau-Pujo, E, Chabert, P, Graham, W G, Marro, F G, Graves, D B
Published in Journal of physics. D, Applied physics (21.09.2008)
Published in Journal of physics. D, Applied physics (21.09.2008)
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Journal Article
Hydrogen Plasmas Processing of Graphene Surfaces
Despiau-Pujo, Emilie, Davydova, Alexandra, Cunge, Gilles, Graves, David B.
Published in Plasma chemistry and plasma processing (01.01.2016)
Published in Plasma chemistry and plasma processing (01.01.2016)
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Journal Article
Pulsed Cl sub(2)/Ar inductively coupled plasma processing: 0D model versus experiments
Despiau-Pujo, E, Brihoum, M, Bodart, P, Darnon, M, Cunge, G
Published in Journal of physics. D, Applied physics (12.11.2014)
Published in Journal of physics. D, Applied physics (12.11.2014)
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Journal Article
MD simulations of chlorine plasmas interaction with ultrathin silicon films for advanced etch processes
Brichon, P., Despiau-Pujo, E., Mourey, O., Petit-Etienne, C., Cunge, G., Darnon, M., Joubert, O.
Published in 2014 Silicon Nanoelectronics Workshop (SNW) (01.06.2014)
Published in 2014 Silicon Nanoelectronics Workshop (SNW) (01.06.2014)
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Conference Proceeding
Cleaning graphene : a first quantum/classical molecular dynamics approach
Delfour, L, Davydova, A, Despiau-Pujo, E, Cunge, G, Graves, D B, Magaud, L
Published in arXiv.org (23.11.2015)
Published in arXiv.org (23.11.2015)
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Journal Article