샘플링 스킴을 결정하기 위한 방법, 반도체 기판 측정 장치, 및 리소그래피 장치
JENSEN ERIK, SMORENBERG PIETER GERARDUS JACOBUS, DERWIN PAUL, YU HYUN WOO, WERKMAN ROY, SARMA GAUTAM, SAPUTRA PUTRA, ELBATTAY KHALID
Year of Publication 20.12.2021
Get full text
Year of Publication 20.12.2021
Patent
제조 프로세스를 제어하기 위한 보정들을 계산하는 방법, 계측 장치, 디바이스 제조 방법 및 모델링 방법
SCHMITT WEAVER EMIL PETER, DERWIN PAUL, ISMAIL AMIR BIN, BHATTACHARYYA KAUSTUVE
Year of Publication 08.10.2018
Get full text
Year of Publication 08.10.2018
Patent
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
SMORENBERG, Pieter Gerardus Jacobus, DERWIN, Paul, ELBATTAY, Khalid, SAPUTRA, Putra
Year of Publication 04.08.2022
Get full text
Year of Publication 04.08.2022
Patent
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
SMORENBERG, Pieter Gerardus Jacobus, DERWIN, Paul, ELBATTAY, Khalid, SAPUTRA, Putra
Year of Publication 20.01.2021
Get full text
Year of Publication 20.01.2021
Patent
METHOD FOR DETERMINING A SAMPLING SCHEME, A SEMICONDUCTOR SUBSTRATE MEASUREMENT APPARATUS, A LITHOGRAPHIC APPARATUS
WERKMAN, Roy, YU, Hyun-Woo, SARMA, Gautam, ELBATTAY, Khalid, DERWIN, Paul, JENSEN, Erik, SAPUTRA, Putra, SMORENBERG, Pieter, Gerardus, Jacobus
Year of Publication 20.09.2023
Get full text
Year of Publication 20.09.2023
Patent
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
SMORENBERG, Pieter Gerardus Jacobus, THIJSSEN, Theo Wilhelmus Maria, ELBATTAY, Khalid, DERWIN, Paul, ZHONG, Bo, SAPUTRA, Putra, MEIJERINK, Rowin, KOMATSU, Masaya, HLAING, Ma Su Su
Year of Publication 14.09.2023
Get full text
Year of Publication 14.09.2023
Patent
METHOD FOR DETERMINING A SAMPLING SCHEME, A SEMICONDUCTOR SUBSTRATE MEASUREMENT APPARATUS, A LITHOGRAPHIC APPARATUS
WERKMAN, Roy, YU, Hyun-Woo, SARMA, Gautam, ELBATTAY, Khalid, DERWIN, Paul, JENSEN, Erik, SAPUTRA, Putra, SMORENBERG, Pieter, Gerardus, Jacobus
Year of Publication 30.08.2023
Get full text
Year of Publication 30.08.2023
Patent
METHOD FOR DETERMINING A SAMPLING SCHEME, A SEMICONDUCTOR SUBSTRATE MEASUREMENT APPARATUS, A LITHOGRAPHIC APPARATUS
SMORENBERG, Pieter Gerardus Jacobus, WERKMAN, Roy, SARMA, Gautam, ELBATTAY, Khalid, DERWIN, Paul, JENSEN, Erik, SAPUTRA, Putra, YU, Hyunwoo
Year of Publication 18.08.2022
Get full text
Year of Publication 18.08.2022
Patent
METHOD FOR DETERMINING A SAMPLING SCHEME, A SEMICONDUCTOR SUBSTRATE MEASUREMENT APPARATUS, A LITHOGRAPHIC APPARATUS
WERKMAN, Roy, YU, Hyun-Woo, SARMA, Gautam, ELBATTAY, Khalid, DERWIN, Paul, JENSEN, Erik, SAPUTRA, Putra, SMORENBERG, Pieter, Gerardus, Jacobus
Year of Publication 05.07.2023
Get full text
Year of Publication 05.07.2023
Patent
Sub-field control of a lithographic process and associated apparatus
Thijssen, Theo Wilhelmus Maria, Meijerink, Rowin, Smorenberg, Pieter Gerardus Jacobus, Elbattay, Khalid, Komatsu, Masaya, Saputra, Putra, Derwin, Paul, Hlaing, Ma Su Su, Zhong, Bo
Year of Publication 30.05.2023
Get full text
Year of Publication 30.05.2023
Patent
Mark position determination method
Bhattacharyya, Kaustuve, Schmitt-Weaver, Emil Peter, Ismail, Amir Bin, Derwin, Paul
Year of Publication 01.06.2021
Get full text
Year of Publication 01.06.2021
Patent
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
SMORENBERG, Pieter Gerardus Jacobus, ELBATTAY, Khalid, DERWIN, Paul, ZHONG, Bo, SAPUTRA, Putra, KOMATSU, Masaya
Year of Publication 04.11.2020
Get full text
Year of Publication 04.11.2020
Patent
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
SMORENBERG, Pieter Gerardus Jacobus, THIJSSEN, Theo Wilhelmus Maria, ELBATTAY, Khalid, DERWIN, Paul, ZHONG, BO, SAPUTRA, Putra, MEIJERINK, Rowin, KOMATSU, Masaya, HLAING, Ma Su Su
Year of Publication 02.06.2022
Get full text
Year of Publication 02.06.2022
Patent
METHOD FOR DETERMINING A SAMPLING SCHEME, A SEMICONDUCTOR SUBSTRATE MEASUREMENT APPARATUS, A LITHOGRAPHIC APPARATUS
WERKMAN, Roy, YU, Hyun-Woo, SARMA, Gautam, ELBATTAY, Khalid, DERWIN, Paul, JENSEN, Erik, SAPUTRA, Putra, SMORENBERG, Pieter, Gerardus, Jacobus
Year of Publication 30.03.2022
Get full text
Year of Publication 30.03.2022
Patent
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
HLAING, Ma, SMORENBURG, Petrus, ELBATTAY, Khalid, DERWIN, Paul, THIJSSEN, Theo, ZHONG, Bo, SAPUTRA, Putra, MEIJERINK, Rowin, KOMATSU, Masaya
Year of Publication 08.10.2020
Get full text
Year of Publication 08.10.2020
Patent
Sub-field control of a lithographic process and associated apparatus
ELBATTAY, KHALID, DERWIN, PAUL, SMORENBERG, PIETER GERARDUS JACOBUS, SAPUTRA, PUTRA
Year of Publication 01.06.2022
Get full text
Year of Publication 01.06.2022
Patent
MARK POSITION DETERMINATION METHOD
ISMAIL, Amir Bin, SCHMITT-WEAVER, Emil Peter, DERWIN, Paul, BHATTACHARYYA, Kaustuve
Year of Publication 28.02.2019
Get full text
Year of Publication 28.02.2019
Patent
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
ELBATTAY, KHALID, DERWIN, PAUL, SMORENBERG, PIETER GERARDUS JACOBUS, SAPUTRA, PUTRA
Year of Publication 11.12.2021
Get full text
Year of Publication 11.12.2021
Patent