Electrical characterization of conductive and non-conductive barrier layers for Cu-metallization
Ahrens, C., Depta, D., Schitthelm, F., Wilhelm, S.
Published in Applied surface science (01.10.1995)
Published in Applied surface science (01.10.1995)
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Journal Article
Comparison of Self-Aligned Silicide Technologies for Shallow CoSi2-Contacts in VLSI-Devices
Schaffer, C., Depta, D., Niewohner, L.
Published in ESSDERC '92: 22nd European Solid State Device Research conference (01.09.1992)
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Published in ESSDERC '92: 22nd European Solid State Device Research conference (01.09.1992)
Conference Proceeding