Fast three-dimensional nanoscale metrology in dual-beam FIB–SEM instrumentation
Repetto, Luca, Buzio, Renato, Denurchis, Carlo, Firpo, Giuseppe, Piano, Emanuele, Valbusa, Ugo
Published in Ultramicroscopy (01.10.2009)
Published in Ultramicroscopy (01.10.2009)
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