Search Results - "Denpoh, Kazuki" :: K.UTB vyhledávací portál

by Iwashita, Shinya, Denpoh, Kazuki, Kagaya, Munehito, Kikuchi, Takamichi, Noro, Naotaka, Hasegawa, Toshio, Moriya, Tsuyoshi, Uedono, Akira
Published in Thin solid films (30.08.2018)

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Impact of ion energies in Ar/H2 capacitively coupled radio frequency discharges on PEALD processes of titanium films

by Iwashita, Shinya, Denpoh, Kazuki, Kikuchi, Takamichi, Suzuki, Yusuke, Wagatsuma, Yuichiro, Hasegawa, Toshio, Moriya, Tsuyoshi
Published in Surface & coatings technology (25.09.2018)

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Modification of Semianalytical Finite Element Model for Radio Frequency Sheaths in Single- and Dual-Frequency Capacitively Coupled Plasmas: II. Effects of Nonuniform Bulk Plasma Density and Charging at Dielectric Surface

by Denpoh, Kazuki
Published in Japanese Journal of Applied Physics (01.03.2011)

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Modification of Semianalytical Finite Element Model for Radio Frequency Sheaths in Single- and Dual-Frequency Capacitively Coupled Plasmas: Incorporating Ion Density Oscillation at Low Frequency

by Denpoh, Kazuki
Published in Japanese Journal of Applied Physics (01.05.2010)

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Effects of driving frequency on plasma density in Ar and H 2 /Ar capacitively coupled plasmas at Torr-order pressure

by Denpoh, Kazuki
Published in Japanese Journal of Applied Physics (01.01.2021)

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Semianalytical Finite Element Method Model for Radio Frequency Sheaths in Single- and Dual-Frequency Capacitively Coupled Plasmas

by Denpoh, Kazuki, Shirafuji, Tatsuru
Published in Japanese Journal of Applied Physics (01.09.2009)

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Simulation of ion energy and angular distribution functions using Monte Carlo method coupled with multidimensional radio frequency sheath model developed utilizing COMSOL Multiphysics

by Denpoh, Kazuki
Published in Japanese Journal of Applied Physics (01.08.2014)

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Numerical strategy for solving the Boltzmann equation with variable E/N using physics-informed neural networks

by Kim, Jin Seok, Denpoh, Kazuki, Kawaguchi, Satoru, Satoh, Kohki, Matsukuma, Masaaki
Published in Journal of physics. D, Applied physics (24.08.2023)

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SUBSTRATE PROCESSING APPARATUS

by DENPOH KAZUKI
Year of Publication 12.09.2017

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Sheath Model for Dual-Frequency Capacitively Coupled Plasmas

by Denpoh, Kazuki, Wakayama, Go, Nanbu, Kenichi
Published in Japanese Journal of Applied Physics (01.08.2004)

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Self-Consistent Particle Simulation of Radio Frequency CF 4 Discharge: Effect of Gas Pressure

by Kazuki Denpoh, Kazuki Denpoh, Kenichi Nanbu, Kenichi Nanbu
Published in Japanese Journal of Applied Physics (01.05.2000)

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Semi-analytical model for a static sheath including a weakly collisional presheath

by Shirafuji, Tatsuru, Denpoh, Kazuki
Published in Japanese Journal of Applied Physics (01.06.2018)

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Impact of ion energies in Ar/H^sub 2^ capacitively coupled radio frequency discharges on PEALD processes of titanium films

by Iwashita, Shinya, Denpoh, Kazuki, Kikuchi, Takamichi, Suzuki, Yusuke, Wagatsuma, Yuichiro, Hasegawa, Toshio, Moriya, Tsuyoshi
Published in Surface & coatings technology (25.09.2018)

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