Initial growth process of carbon nanowalls synthesized by radical injection plasma-enhanced chemical vapor deposition
Kondo, Shingo, Kawai, Shinji, Takeuchi, Wakana, Yamakawa, Koji, Den, Shoji, Kano, Hiroyuki, Hiramatsu, Mineo, Hori, Masaru
Published in Journal of applied physics (01.11.2009)
Published in Journal of applied physics (01.11.2009)
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Journal Article
Development of atomic radical monitoring probe and its application to spatial distribution measurements of H and O atomic radical densities in radical-based plasma processing
Takahashi, Shunji, Takashima, Seigo, Yamakawa, Koji, Den, Shoji, Kano, Hiroyuki, Takeda, Keigo, Hori, Masaru
Published in Journal of applied physics (01.09.2009)
Published in Journal of applied physics (01.09.2009)
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Journal Article
Nitriding of Polymer by Low Energy Nitrogen Neutral Beam Source
Hara, Yasuhiro, Takeda, Keigo, Yamakawa, Koji, Den, Shoji, Toyoda, Hirotaka, Sekine, Makoto, Hori, Masaru
Published in Applied physics express (01.03.2012)
Published in Applied physics express (01.03.2012)
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Journal Article
Behaviors of Absolute Densities of N, H, and NH3 at Remote Region of High-Density Radical Source Employing N2--H2 Mixture Plasmas
Chen, Shang, Kondo, Hiroki, Ishikawa, Kenji, Takeda, Keigo, Sekine, Makoto, Kano, Hiroyuki, Den, Shoji, Hori, Masaru
Published in Jpn J Appl Phys (01.01.2011)
Published in Jpn J Appl Phys (01.01.2011)
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Journal Article
Achieving high-growth-rate in GaN homoepitaxy using high-density nitrogen radical source
Kawai, Yohjiro, Chen, Shang, Honda, Yoshio, Yamaguchi, Masahito, Amano, Hiroshi, Kondo, Hiroki, Hiramatsu, Mineo, Kano, Hiroyuki, Yamakawa, Koji, Den, Shoji, Hori, Masaru
Published in Physica status solidi. C (01.07.2011)
Published in Physica status solidi. C (01.07.2011)
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Journal Article
An Autonomously Controllable Plasma Etching System Based on Radical Monitoring
Takahashi, Shunji, Kawauchi, Ryota, Takashima, Seigo, Den, Shoji, Katagiri, Toshiro, Kano, Hiroyuki, Ohta, Takayuki, Ito, Masafumi, Suzuki, Tatsuya, Takeda, Keigo, Hori, Masaru
Published in Japanese Journal of Applied Physics (01.07.2012)
Published in Japanese Journal of Applied Physics (01.07.2012)
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Journal Article
Compact electron cyclotron resonance plasma source optimization for ion beam applications
O'KEEFE, P, YAMAKAWA, K, MUTOH, H, DEN, S, HAYASHI, Y
Published in Japanese Journal of Applied Physics (01.07.1997)
Published in Japanese Journal of Applied Physics (01.07.1997)
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Conference Proceeding
Journal Article
Development and characterization of a new compact microwave radical beam source
DEN, S, O'KEEFFE, P, HAYASHI, Y, ITO, M, IIORI, M, GOTO, T
Published in Japanese Journal of Applied Physics (01.07.1997)
Published in Japanese Journal of Applied Physics (01.07.1997)
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Conference Proceeding
Journal Article
METHOD FOR MANUFACTURING CBN FILM
YAMAKAWA KOJI, DEN SHOJI, TAKASHIMA SEIGO, HORI MASARU, IWATA MASANAO, YAMAMOTO HIROYUKI, ISHIKAWA KENJI
Year of Publication 31.08.2020
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Year of Publication 31.08.2020
Patent
Diagnostics of fluorocarbon radicals in a large-area permanent magnet electron cyclotron resonance etching plasma
DEN, S, KUNO, T, ITO, M, HORI, M, GOTO, T, HAYASHI, Y, SAKAMOTO, Y
Published in Japanese Journal of Applied Physics (01.12.1996)
Published in Japanese Journal of Applied Physics (01.12.1996)
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Conference Proceeding
Journal Article
Development and applications of a compact electron cyclotron resonance source
O'KEEFFE, P, KOMURO, S, DEN, S, MORIKAWA, T, AOYAGI, Y
Published in Japanese Journal of Applied Physics (01.11.1991)
Published in Japanese Journal of Applied Physics (01.11.1991)
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Journal Article
cBN MOLDING AND METHOD FOR MANUFACTURING cBN FILM
YAMAKAWA Koji, HORI Masaru, DEN Shoji, YAMAMOTO Hiroyuki, NONOYAMA Yoshiaki, TAKASHIMA Seigo
Year of Publication 26.04.2018
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Year of Publication 26.04.2018
Patent
cBN FORMATION BODY AND METHOD OF MANUFACTURING cBN FILM
YAMAKAWA KOJI, DEN SHOJI, TAKASHIMA SEIGO, NONOYAMA YOSHIAKI, HORI MASARU, YAMAMOTO HIROYUKI
Year of Publication 26.04.2018
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Year of Publication 26.04.2018
Patent
GROWTH-PROMOTING AQUEOUS SOLUTION, DEVICE FOR PRODUCING SAME AND METHOD FOR PRODUCING AGRICULTURAL CROPS OR FISHES
MIZUNO Masaaki, HASHIZUME Hiroshi, YAMAKAWA Koji, ISHIKAWA Kenji, HORI Masaru, DEN Shoji, NAKAI Yoshihiro, TANAKA Hiromasa, AKIYAMA Shin-ichi
Year of Publication 17.05.2018
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Year of Publication 17.05.2018
Patent