Study of fluorine stability in fluoro-silicate glass and effects on dielectric properties
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Published in Microelectronic engineering (1997)
Published in Microelectronic engineering (1997)
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Journal Article
Conference Proceeding
Differential body effect analysis and optimization of the LArge Tilt Implanted Sloped Shallow Trench Isolation Process (LATI-STI)
DELEONIBUS, S, HEITMANN, M, GOBIL, Y, MARTIN, F, DEMOLLIENS, O, GUIBERT, J.-C, TOFFOLI, A
Published in Japanese Journal of Applied Physics (01.08.1996)
Published in Japanese Journal of Applied Physics (01.08.1996)
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Journal Article
METHOD OF MAKING INTERCONNECTION STRUCTURE WITH INSULATION COMPRISING CAVITIES
TROUILLER, YORICK, DEMOLLIENS, OLIVIER, BERRUYER, PASCALE, MORAND, YVES
Year of Publication 08.06.2011
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Year of Publication 08.06.2011
Patent
METHOD OF MAKING INTERCONNECTION STRUCTURE WITH INSULATION COMPRISING CAVITIES
TROUILLER, YORICK, DEMOLLIENS, OLIVIER, BERRUYER, PASCALE, MORAND, YVES
Year of Publication 25.09.2002
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Year of Publication 25.09.2002
Patent
INTERCONNECTION STRUCTURE WITH INSULATION COMPRISING CAVITIES
TROUILLER, YORICK, DEMOLLIENS, OLIVIER, BERRUYER, PASCALE, MORAND, YVES
Year of Publication 12.07.2001
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Year of Publication 12.07.2001
Patent