Impact of the pre amorphization by Ge implantation on Ni0.9Pt0.1 silicide
Delwail, C., Joblot, S., Mazen, F., Abbate, F., Lachal, L., Milesi, F., Bertoglio, M., Papon, A.M., Gregoire, M., Rodriguez, P.H., Mangelinck, D.
Published in Microelectronic engineering (01.02.2022)
Published in Microelectronic engineering (01.02.2022)
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Journal Article
Evolution of the Ni0.9Pt0.1/Si system under annealing via nano-crystalline textured phases
Guillemin, S., Gergaud, P., Bernier, N., Merlin, M., Delwail, C., Minoret, S., Famulok, R., Gregoire, M., Nemouchi, F., Rodriguez, Ph
Published in Journal of applied physics (21.07.2023)
Published in Journal of applied physics (21.07.2023)
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Journal Article
Impact of the pre amorphization by Ge implantation on Ni$_{0.9}$Pt$_{0.1}$ silicide
Delwail, C., Joblot, S., Mazen, F., Abbate, F., Lachal, L., Milesi, F., Bertoglio, M., Papon, A.M., Gregoire, M., Rodriguez, P.H., Mangelinck, D., Mangelinck, Dominique
Published in Microelectronic engineering (01.02.2022)
Published in Microelectronic engineering (01.02.2022)
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Journal Article