Spacer defined FinFET: Active area patterning of sub-20 nm fins with high density
Degroote, B., Rooyackers, R., Vandeweyer, T., Collaert, N., Boullart, W., Kunnen, E., Shamiryan, D., Wouters, J., Van Puymbroeck, J., Dixit, A., Jurczak, M.
Published in Microelectronic engineering (01.04.2007)
Published in Microelectronic engineering (01.04.2007)
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Journal Article
Ultrathin Fe layers on Ag (1 0 0) surface
Dézsi, I., Fetzer, Cs, Szűcs, I., Degroote, B., Vantomme, A., Kobayashi, T., Nakanishi, A.
Published in Surface science (15.06.2007)
Published in Surface science (15.06.2007)
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Journal Article
A functional 41-stage ring oscillator using scaled FinFET devices with 25-nm gate lengths and 10-nm fin widths applicable for the 45-nm CMOS node
Collaert, N., Dixit, A., Goodwin, M., Anil, K.G., Rooyackers, R., Degroote, B., Leunissen, L.H.A., Veloso, A., Jonckheere, R., De Meyer, K., Jurczak, M., Biesemans, S.
Published in IEEE electron device letters (01.08.2004)
Published in IEEE electron device letters (01.08.2004)
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Journal Article
Coarsening of antiferromagnetic domains in multilayers: the key role of magnetocrystalline anisotropy
Nagy, D L, Bottyán, L, Croonenborghs, B, Deák, L, Degroote, B, Dekoster, J, Lauter, H J, Lauter-Pasyuk, V, Leupold, O, Major, M, Meersschaut, J, Nikonov, O, Petrenko, A, Rüffer, R, Spiering, H, Szilágyi, E
Published in Physical review letters (15.04.2002)
Published in Physical review letters (15.04.2002)
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Journal Article
Influence of interfacial roughness on the Fe/Mn/Fe trilayers coupling
PASSAMANI, E, CROONENBORGHS, B, VANORMELINGEN, K, DEGROOTE, B, VANTOMME, A
Published in Journal of magnetism and magnetic materials (21.04.2005)
Published in Journal of magnetism and magnetic materials (21.04.2005)
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Journal Article
Optimization of low temperature silicon nitride processes for improvement of device performance
Sleeckx, E., Schaekers, M., Shi, X., Kunnen, E., Degroote, B., Jurczak, M., de Potter de ten Broeck, M., Augendre, E.
Published in Microelectronics and reliability (01.05.2005)
Published in Microelectronics and reliability (01.05.2005)
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Journal Article
Conference Proceeding
Spacer defined FinFET: Active area patterning of sub-20nm fins with high density
Degroote, B., Rooyackers, R., Vandeweyer, T., Collaert, N., Boullart, W., Kunnen, E., Shamiryan, D., Wouters, J., Van Puymbroeck, J., Dixit, A., Jurczak, M.
Published in Microelectronic engineering (01.04.2007)
Published in Microelectronic engineering (01.04.2007)
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Journal Article
Conservation of uniaxial symmetry in Fe/Ag multilayers grown on stepped Ag(0 0 1)
Degroote, B., Major, M., Meersschaut, J., Dekoster, J., Langouche, G.
Published in Surface science (2001)
Published in Surface science (2001)
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Journal Article
Diffusion-induced step decoration of Co on Ag(001)
Degroote, B., Pattyn, H., Degroote, S., Vantomme, A., Dekoster, J., Langouche, G.
Published in Thin solid films (22.12.2000)
Published in Thin solid films (22.12.2000)
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Journal Article
Conference Proceeding
Hyperfine interaction studies with monolayer depth resolution using ultra-low energy radioactive ion beams
Vantomme, A., Degroote, B., Degroote, S., Vanormelingen, K., Meersschaut, J., Croonenborghs, B., Van Eek, S.M., Pattyn, H., Rots, M., Langouche, G.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.2002)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.2002)
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Journal Article
CMP-less integration of fully Ni-silicided metal gates in FinFETs by simultaneous silicidation of the source, drain, and the gate using a novel dual hard mask approach
Anil, K.G., Verheyen, P., Collaert, N., Dixit, A., Kaczer, B., Snow, J., Vos, R., Locorotondo, S., Degroote, B., Shi, X., Rooyackers, R., Mannaert, G., Brus, S., Yim, Y.S., Lauwers, A., Goodwin, M., Kittl, J.A., van Dal, M., Richard, O., Veloso, A., Kubicek, S., Beckx, S., Boullart, W., De Meyer, K., Absil, P., Jurczak, M., Biesemans, S.
Published in Digest of Technical Papers. 2005 Symposium on VLSI Technology, 2005 (2005)
Published in Digest of Technical Papers. 2005 Symposium on VLSI Technology, 2005 (2005)
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Conference Proceeding
Integration challenges for multi-gate devices
Collaert, N., Brus, S., De Keersgieter, A., Dixit, A., Ferain, I., Goodwin, M., Kottantharayil, A., Rooyackers, R., Verheyen, P., Yim, Y., Zimmerman, P., Beckx, S., Degroote, B., Demand, M., Kim, M., Kunnen, E., Locorotondo, S., Mannaert, G., Neuilly, F., Shamiryan, D., Baerts, C., Ercken, M., Laidlcr, D., Leys, F., Loo, R., Lisoni, J., Snow, J., Vos, R., Boullart, W., Pollentier, I., De Gendt, S., De Meyer, K., Jurczak, M., Biescmans, S.
Published in 2005 International Conference on Integrated Circuit Design and Technology, 2005. ICICDT 2005 (2005)
Published in 2005 International Conference on Integrated Circuit Design and Technology, 2005. ICICDT 2005 (2005)
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Conference Proceeding
CD SEM calibration to TEM for accurate metrology of fins in MuGFET devices
Lorusso, G.F., Collaert, N., Rooyackers, R., Ercken, M., Pollentier, I., Cheng, S., Degroote, B., Jurczak, M., Biesemans, S., Richard, O., Bender, H., Azordegan, A., Kuppa, R., Shirke, S., Prochazka, J., Long, T.
Published in ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005 (2005)
Published in ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005 (2005)
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Conference Proceeding
Step-induced canting of magnetization in Fe/Ag superlattices
Dekoster, J, Meersschaut, J, Degroote, B, Degroote, S, L'abbé, C, Koops, G, Prandolini MJ, Phalet, T, Vanneste, L, Pfannes, H D, Nagy, D L, Bottyan, L, Rüffer, R, Leupold, O, Langouche, G
Published in Hyperfine interactions (01.01.2000)
Published in Hyperfine interactions (01.01.2000)
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Journal Article
Highly manufacturable FinFETs with sub-10nm fin width and high aspect ratio fabricated with immersion lithography
van Dal, M. J. H., Collaert, N., Doornbos, G., Vellianitis, G., Curatola, G., Pawlak, B. J., Duffy, R., Jonville, C., Degroote, B., Altamirano, E., Kunnen, E., Demand, M., Beckx, S., Vandeweyer, T., Delvaux, C., Leys, F., Hikavyy, A., Rooyackers, R., Kaiser, M., Weemaes, R. G. R., Biesemans, S., Jurczak, M., Anil, K., Witters, L., Lander, R. J. P.
Published in 2007 IEEE Symposium on VLSI Technology (01.06.2007)
Published in 2007 IEEE Symposium on VLSI Technology (01.06.2007)
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Conference Proceeding
A Low-Power Multi-Gate FET CMOS Technology with 13.9ps Inverter Delay, Large-Scale Integrated High Performance Digital Circuits and SRAM
von Arnim, K., Augendre, E., Pacha, A.C., Schulz, T., San, K.T., Bauer, F., Nackaerts, A., Rooyackers, R., Vandeweyer, T., Degroote, B., Collaert, N., Dixit, A., Singanamalla, R., Xiong, W., Marshall, A., Cleavelin, C.R., Schrufer, K., Jurczak, M.
Published in 2007 IEEE Symposium on VLSI Technology (01.06.2007)
Published in 2007 IEEE Symposium on VLSI Technology (01.06.2007)
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Conference Proceeding
The etchback approach: Enlarged process window for MuGFET gate etching
Degroote, Bart, Collaert, Nadine, Rooyackers, Rita, Baklanov, Mikhail R., Boullart, Werner, Kunnen, Eddy, Jurczak, Malgorzata, Vanhaelemeersch, Serge
Published in Microelectronic engineering (01.03.2006)
Published in Microelectronic engineering (01.03.2006)
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Journal Article
Conservation of uniaxial symmetry in Fe/Ag multilayers grown on stepped Ag(001)
Degroote, B, Major, M, Meersschaut, J, Dekoster, J, Langouche, G
Published in Surface science (05.09.2000)
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Published in Surface science (05.09.2000)
Journal Article