Process Control Solutions for GaN-on-Si Devices in a Production Line
Carboni, Francesco F., Perego, Luca M., Czeppel, Laura T., Capelli, Daniele, Moio, Bruno, Adamo, Costanza, Bollin, Maddalena, Barbisan, Luca, Bellando, Francesco, Salamone, Matteo M., Sharma, Parikshit, Parisi, Paolo, Deepak, Shruti, Dayyala, Manoj K.
Published in 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (13.05.2024)
Published in 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (13.05.2024)
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