Interface preservation during Ge-rich source/drain contact formation
Niu, C., Raymond, M., Kamineni, V., Fronheiser, J., Siddiqui, S., Niimi, H., Dechene, J. M., Labonte, A., Adusumilli, P., Carr, A. V., Shearer, J., Demarest, J., Jiang, L., Li, J., Hengstebeck, R. W.
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
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